CAJ | 학술논문

在小间隙静电放电(ESD)中，电极移动速度和气体压强会对测量放电参数出现的低重复离散特性产生影响。基于自主研发的新型测试系统，完成气体压强变化和向放电靶移动电极放电相关参数的测量。静电放电模拟器移动距离控制范围在10cm-40cm。在间隙气体压强变化和放电枪以不同速度向靶移动放电的两种情况下，放电电流峰值和波形产生了显著的差异，证明了电极移动速度和空气压强都对放电参数产生显著影响。本文对放电参数受电极移动速度和气体压强变化而出现显著差异的可能机制进行了初步分析。
재소간극정전방전(ESD)중，전겁이동속도화기체압강회대측량방전삼수출현적저중복리산특성산생영향。기우자주연발적신형측시계통，완성기체압강변화화향방전파이동전겁방전상관삼수적측량。정전방전모의기이동거리공제범위재10cm-40cm。재간극기체압강변화화방전창이불동속도향파이동방전적량충정황하，방전전류봉치화파형산생료현저적차이，증명료전겁이동속도화공기압강도대방전삼수산생현저영향。본문대방전삼수수전겁이동속도화기체압강변화이출현현저차이적가능궤제진행료초보분석。
Low repeatability of discharge parameter measurement is affected strongly by velocity of electrode to the target and gas pressure variation. Based on our newly developed experiment system, several factors of gas pressure, electrode velocity to the target, temperature, relative humidity, etc. can be measured. The range of electrostatic discharge generation displace is 10cm-40cm.Variation of gas pressure in gap and electrode velocity moving to the target resulted in drastic change of discharge peak values and discharge waveforms. Validation was given on strong impact of both electrode velocity to the target and air pressure variation on discharge parameters. A brief analysis was provided for possible effect mechanism of electrode velocity and air pressure on discharge parameters in short gap electrostatic discharge.