吉林师范大学学报(自然科学版)
吉林師範大學學報(自然科學版)
길림사범대학학보(자연과학판)
JILIN NORMAL UNIVERSITY JOURNAL(NATURAL SCIENCE EDITION)
2014年
4期
29-31
,共3页
纳米多孔 InP%气敏特性%氨气
納米多孔 InP%氣敏特性%氨氣
납미다공 InP%기민특성%안기
nano porous InP%gas sensing properties%ammonia
InP 是继 Si 和 GaAs 之后的新一代电子功能材料,利用多孔半导体制成微型化和集成度较高的气敏传感器也一直是研究的热点,但对多孔 InP 的气敏特性研究甚少。本文拟通过电化学刻蚀方法制备纳米多孔 InP,并观察其对氨气的伏安特性响应,从而分析该材料的气敏特性。
InP 是繼 Si 和 GaAs 之後的新一代電子功能材料,利用多孔半導體製成微型化和集成度較高的氣敏傳感器也一直是研究的熱點,但對多孔 InP 的氣敏特性研究甚少。本文擬通過電化學刻蝕方法製備納米多孔 InP,併觀察其對氨氣的伏安特性響應,從而分析該材料的氣敏特性。
InP 시계 Si 화 GaAs 지후적신일대전자공능재료,이용다공반도체제성미형화화집성도교고적기민전감기야일직시연구적열점,단대다공 InP 적기민특성연구심소。본문의통과전화학각식방법제비납미다공 InP,병관찰기대안기적복안특성향응,종이분석해재료적기민특성。
Following Si and GaAs,InP is a new generation of electronic functional materials. The preparation of gas sensors with high integration by using porous semiconductor has also been attracted the attention of researchers,but little work has been made for gas sensing properties of porous InP. In this paper,nano porous InP was prepared by electrochemical etching,and its responsing of the voltage current characteristic to ammonia was observed to analyze gas sensing properties of the prepared material.