CAJ | 학술논문

以苯酐、盐酸羟胺和4-甲基苯磺酰氯为原料，合成了N-羟基邻苯二甲酰亚胺对甲苯磺酸酯，并利用红外、核磁共振和紫外对其进行表征，研究了溶解性、紫外吸收和光刻等性能。结果表明，该产酸剂在常见有机溶剂中表现出良好的溶解性，并在248 nm处有好的透明性，可应用于深紫外光致抗蚀剂体系。
이분항、염산간알화4-갑기분광선록위원료，합성료N-간기린분이갑선아알대갑분광산지，병이용홍외、핵자공진화자외대기진행표정，연구료용해성、자외흡수화광각등성능。결과표명，해산산제재상견유궤용제중표현출량호적용해성，병재248 nm처유호적투명성，가응용우심자외광치항식제체계。
Phthalimidotosylate was synthesized from phthalie anhydride,hydroxylamine hydroehloride and p-toluenesulfonyl ehloride,whieh was eharaeterized by IR,1 H NMR and Ultraviolet speetrograph to study its solubility and absorption properties of UV. The results shows that phthalimidotosylate has good solubili-ty,fine transpareney,whieh ean be used as photoaeid generator in deep UV resist system.