CAJ | 학술논문

采用射频磁控溅射法在 Si 衬底上制备了Zn1－x Fex O (x ＝1．0％,3．0％,5．0％)薄膜样品,并利用 X 射线衍射(XRD)、扫描电子显微(SEM)、X 射线光电子能谱(XPS)对其微结构、表面形貌和化学成分及价态进行分析,结果表明,Zn1－x Fex O (x ＝1．0％,3．0％,5．0％)薄膜晶体结构为 c 轴择优生长的六角纤锌矿结构,Fe 在晶体中以二价和三价两种价态存在.利用振动样品强磁计(VSM)对样品的铁磁性进行测试,薄膜样品在室温下具有明显的铁磁性,并经分析认为铁磁性来源可能是磁性离子与空位缺陷形成束缚磁极子引起的结果.
채용사빈자공천사법재 Si 츤저상제비료Zn1－x Fex O (x ＝1．0％,3．0％,5．0％)박막양품,병이용 X 사선연사(XRD)、소묘전자현미(SEM)、X 사선광전자능보(XPS)대기미결구、표면형모화화학성분급개태진행분석,결과표명,Zn1－x Fex O (x ＝1．0％,3．0％,5．0％)박막정체결구위 c 축택우생장적륙각섬자광결구,Fe 재정체중이이개화삼개량충개태존재.이용진동양품강자계(VSM)대양품적철자성진행측시,박막양품재실온하구유명현적철자성,병경분석인위철자성래원가능시자성리자여공위결함형성속박자겁자인기적결과.
Zn1 -x Fex O (x =1.0%,3.0%,5.0%)thin films deposited on Si were successfully prepared by radio frequency magnetron sputtering.The microstructure,chemical composition,valence states,morphology and ferromagnetism of the films had been investigated by X-ray diffraction (XRD),X-ray photoelectron spectrosco-py (XPS),scanning electronic microscopy (SEM)and vibrating sample magnetometer (VSM),respectively. The results indicate that highly c -axis preferential orientation of Zn1 -x Fex O films with wurtzite phase was suc-cessfully fabricated by Fe doping.Valence state of Fe in Zn1 -x Fex O films was a mixture of 2+ and 3+.The re-sults of VSM experiment proved the ferromagnetism of Zn1 -x Fex O at room temperature.The sources of ferro-magnetic are attributed to magnetic polaron induced by the magnetic ions and the vacancy defects.