CAJ | 학술논문

采用化学气相沉积(CVD)方法制备了 P 掺杂 ZnO 纳米梳,扫描电子显微镜(SEM)结果显示,纳米梳状产物均匀分布在 Si 衬底上.P 掺杂 ZnO 纳米梳为高度结晶的六方纤锌矿结构,ZnO 中 P 的掺杂含量约为2％(原子分数).室温光致发光(PL)光谱表明,P 掺杂 ZnO 纳米梳在样品不同区域的发光性能略有不同,但是均出现3个发光峰：紫外、绿光和近红外发光峰.同时 PL 结果也表明样品的整体结晶质量比较好.
채용화학기상침적(CVD)방법제비료 P 참잡 ZnO 납미소,소묘전자현미경(SEM)결과현시,납미소상산물균균분포재 Si 츤저상.P 참잡 ZnO 납미소위고도결정적륙방섬자광결구,ZnO 중 P 적참잡함량약위2％(원자분수).실온광치발광(PL)광보표명,P 참잡 ZnO 납미소재양품불동구역적발광성능략유불동,단시균출현3개발광봉：자외、록광화근홍외발광봉.동시 PL 결과야표명양품적정체결정질량비교호.
P-doped ZnO nanocombs were successfully synthesized via a simple chemical vapor deposition (CVD) method.SEM results indicate that the production composes of nanocombs.P doping concentration was about 2 at%.X-ray diffraction (XRD)spectrum of the P-doped ZnO nanocombs reflects the wurtzite structure,and no any impurity phase was detected.In addition,the photoluminescence spectra of the P-doped ZnO nanocomb were also investigated.There were three emission peaks,ultraviolet emission,green emission and near-infrared emission.The high intensity of ultraviolet and near-infrared emission peaks reveals that the crystal quality of the nanocombs was high.