CAJ | 학술논문

采用射频反应磁控溅射技术制备一系列不同W含量的TiWN复合膜。利用X射线衍射仪、纳米压痕仪、摩擦磨损仪等对TiWN复合膜微结构、力学性能和摩擦性能进行表征。结果表明：当W含量为10.19%时，TiWN复合膜呈fcc结构的TiWN相和Ti相双相结构；当W含量为25.42%时，复合膜中除TiWN相和Ti相，还出现了Ti2N新相；而当W含量为35.29%时，Ti相消失，W2N和β-W新相生成；当W含量增加到46.91%时，薄膜由TiWN, Ti2N, W2N和β-W相组成。随W含量的增加，薄膜硬度先升高后降低，室温摩擦因数和磨损率先减小后增大。W含量为35.29%时，硬度达到最大值，为30.67 GPa，室温摩擦因数和磨损率达到最小值，分别为0.531和3.662×10-8 mm2N-1。随温度升高，薄膜的摩擦因数先增大后减小，当温度升至800℃时，摩擦因数降至最低，为0.397。
채용사빈반응자공천사기술제비일계렬불동W함량적TiWN복합막。이용X사선연사의、납미압흔의、마찰마손의등대TiWN복합막미결구、역학성능화마찰성능진행표정。결과표명：당W함량위10.19%시，TiWN복합막정fcc결구적TiWN상화Ti상쌍상결구；당W함량위25.42%시，복합막중제TiWN상화Ti상，환출현료Ti2N신상；이당W함량위35.29%시，Ti상소실，W2N화β-W신상생성；당W함량증가도46.91%시，박막유TiWN, Ti2N, W2N화β-W상조성。수W함량적증가，박막경도선승고후강저，실온마찰인수화마손솔선감소후증대。W함량위35.29%시，경도체도최대치，위30.67 GPa，실온마찰인수화마손솔체도최소치，분별위0.531화3.662×10-8 mm2N-1。수온도승고，박막적마찰인수선증대후감소，당온도승지800℃시，마찰인수강지최저，위0.397。
A series of TiWN composite films with different W contents were deposited by RF-reactive magnetron sputtering technique. The microstructure, mechanical and tribological properties of TiWN composite films were investigated by X-ray diffraction, nano indentation, CSM high temperature ball-on-disc tribo-meter and so on. The results show that the microstructure of TiWN film is consisted of fcc structure TiWN phase and Ti phase when W content is 10.19%. Besides TiWN phase and Ti phase in the film, Ti2N phase appears when W content is 25.42%, while Ti phase disappears, W2N phase andβ-W phase appear when W content is 35.29%. The film is consisted of TiWN, Ti2N, W2N andβ-W phase when W content is 46.91%. The hardnesses of films increase first then decrease, while the friction coefficients and wear rate decrease first and then increase with the increase of W content. It achieves maximum value of hardness , 30.67 GPa, and obtains minimum value of friction coefficient and wear rate, 0.531 and 3.662×10-8mm2N-1, when W content is 35.29%at room temperature. The friction coefficients of films show an up-down curve with increase of test temperatures and reaches minimum value of 0.397 when the temperature is 800℃.