CAJ | 학술논문

在偏置电压较低的情况下，光发射信号较弱，容易被器件的噪声所干扰，造成成像效果不佳。为此，文中建立了光发射显微（PEM）图像的信号－噪声模型，设计了差分图像定位算法来提高光发射探测的精度。该算法首先通过调整偏置电压获取失效信号强度不同的两组图像，计算出两组图像的差分均值图像，再对其进行均值滤波器、图像二值化等处理，得到统计图像，最后根据统计图像确定集成电路失效点的位置。物理分析结果验证了基于差分图像定位法的集成电路光发射探测技术的准确性。
재편치전압교저적정황하，광발사신호교약，용역피기건적조성소간우，조성성상효과불가。위차，문중건립료광발사현미（PEM）도상적신호－조성모형，설계료차분도상정위산법래제고광발사탐측적정도。해산법수선통과조정편치전압획취실효신호강도불동적량조도상，계산출량조도상적차분균치도상，재대기진행균치려파기、도상이치화등처리，득도통계도상，최후근거통계도상학정집성전로실효점적위치。물리분석결과험증료기우차분도상정위법적집성전로광발사탐측기술적준학성。
When the bias voltage is low,PEM(Photon Emission Microscopy)failure signal is weak and is easy to be influenced by noise,which results in a poor quality of PEMimage.In order to solve this problem,a signal-noise model of PEMimage is established,and a differential image localization algorithm is designed to improve the PEM precision.First,this algorithm acquires two groups of images with different failure signal strengths by adjusting the bias voltage.Then,the average differential image of these two group images is calculated and dealt with by means of mean filter and image binarization,thus obtaining a statistical image.Finally,IC failure points can be effectively located according to the statistical image.Physical analysis demonstrates the accuracy of IC PEMbased on the pro-posed differential image localization algorithm.