CAJ | 학술논문

压电陶瓷在精密控制中具有重要作用，而其在快速控制中的实际高频响应却缺少有效且精密的方法。总结了目前测量压电陶瓷特性的方法，分析了测量中存在的困难和不足，使用基于激光回馈干涉原理的Nd：YAG微片激光回馈干涉测量系统对压电陶瓷的动态特性进行了研究。使用两种压电陶瓷在100 Hz~7 kHz驱动电压下对位移响应进行了测量，相应测量位移范围7~34 nm。测量精度达到纳米量级，对较高的振动频率实现了准确测量。该方法具有很高的测量精度，对被测对象要求较低。
압전도자재정밀공제중구유중요작용，이기재쾌속공제중적실제고빈향응각결소유효차정밀적방법。총결료목전측량압전도자특성적방법，분석료측량중존재적곤난화불족，사용기우격광회궤간섭원리적Nd：YAG미편격광회궤간섭측량계통대압전도자적동태특성진행료연구。사용량충압전도자재100 Hz~7 kHz구동전압하대위이향응진행료측량，상응측량위이범위7~34 nm。측량정도체도납미량급，대교고적진동빈솔실현료준학측량。해방법구유흔고적측량정도，대피측대상요구교저。
The piezoelectric ceramic plays an important role in the precision control system, but it lacks effective and precise measurement methods for its actual high frequency response in fast control system. The present methods of measuring characteristics of piezoelectric ceramics were summarized in this paper and their difficulties and shortages were also analyzed, the laser feedback interference principle based Nd:YAG microchip laser feedback interference measurement system was used to study the dynamic characteristics of piezoelectric ceramics. The displacement of two kinds of piezoelectric ceramics was measured with the drive frequency range from 100 Hz to 7 kHz, and the corresponding displacement scale was 7-34 nm. The accuracy could reach nanoscale, accurate measurement under higher drive frequency was also achieved. The method has very high measurement accuracy, and lower requirements on the measured object.