CAJ | 학술논문

数字闭环石英挠性加速度计可以有效地解决传统模拟式加速度计在模数转换中引起的精度损失问题，而数字式加速度计的精度主要取决于差动电容检测环节。阐述了数字式加速度计的工作原理，重点设计了差动电容检测方法，利用单载波调制与数字自相关解调技术构建完整的数字式加速度计信号检测方案。搭建数字式加速度计原理样机，对其进行0 g/±1 g稳定性测试，得到数字式加速度计0 g/±1 g零偏稳定性分别为17.5950μg、19.3637μg、20.7153μg。测试结果表明，当前的数字式加速度计精度达到了模拟式加速度计精度量级，有效验证了该方案的可行性及正确性。
수자폐배석영뇨성가속도계가이유효지해결전통모의식가속도계재모수전환중인기적정도손실문제，이수자식가속도계적정도주요취결우차동전용검측배절。천술료수자식가속도계적공작원리，중점설계료차동전용검측방법，이용단재파조제여수자자상관해조기술구건완정적수자식가속도계신호검측방안。탑건수자식가속도계원리양궤，대기진행0 g/±1 g은정성측시，득도수자식가속도계0 g/±1 g령편은정성분별위17.5950μg、19.3637μg、20.7153μg。측시결과표명，당전적수자식가속도계정도체도료모의식가속도계정도량급，유효험증료해방안적가행성급정학성。
The digital closed-loop quartz flex accelerometer (DCLA) can effectively solve the precision loss which exists in the output current to the digital conversion of the traditional analog quartz flex accelerometer, and the accuracy of the DCLA mainly depends on the differential capacitance detection circuit. The working principle of DCLA was introduced, and the signal detection scheme was studied. According to the signal characteristics, with the method of single carrier modulation and demodulation technology, triangle wave modulation technique was applied to implement the capacitance detection, and the digital correlative demodulation scheme was proposed to extract the amplitude signal. To build the DCLA experimental prototype, under the 0 g/±1 g stability test, the bias stability of 0 g/±1 g was 17.595 0μg, 19.363 7μg and 20.715 3μg, respectively. Currently, the result shows that the precision of the DCLA is basically equal to the traditional analog accelerometer, which verifies the correctness of the signal detection method.