CAJ | 학술논문

无线无源高温压力传感器在高温、高压等恶劣环境中应用日益广泛，其耐高温性能已成为衡量传感器的一项最基本且重要的指标。利用低温共烧陶瓷LTCC( Low Temperature Co￣Fired Ceramic)技术，分别设计和制作了陶瓷基片上电感及电容器件，并进行高温特性测试，通过讨论和分析确定了造成电感和电容随温度变化的原因。测试结果表明：在100℃~500℃温度范围内，电感L基本保持不变，等效串联电阻R增大了2.7倍，电容C增大了5.3％，从而LC谐振传感器的品质因数Q减小了72.8％。该测试及分析对高温环境下基于LC谐振式压力传感器的优化设计具有重要的指导意义。
무선무원고온압력전감기재고온、고압등악렬배경중응용일익엄범，기내고온성능이성위형량전감기적일항최기본차중요적지표。이용저온공소도자LTCC( Low Temperature Co￣Fired Ceramic)기술，분별설계화제작료도자기편상전감급전용기건，병진행고온특성측시，통과토론화분석학정료조성전감화전용수온도변화적원인。측시결과표명：재100℃~500℃온도범위내，전감L기본보지불변，등효천련전조R증대료2.7배，전용C증대료5.3％，종이LC해진전감기적품질인수Q감소료72.8％。해측시급분석대고온배경하기우LC해진식압력전감기적우화설계구유중요적지도의의。
The applications of wireless passive pressure sensor in harsh environments,such as high temperature and high pressure,is becoming more and more widely. The high temperature resistant performance has become one of the most basic and important indexes of the sensor. Using low temperature co￣fired ceramic( LTCC) technology,the induc￣tor and capacitor based on ceramic substrate has been designed and fabricated respectively,the high temperature prop￣erties test is also carried out,and the causes of the inductor and capacitor which are varied with temperature,through the discussion and analysis are determined. With the temperature range from 100℃ to 500℃,test results show that inductance L basically remains the same,the resistance R increases by 2. 7 times,the capacitance C increases by 5.3%,thus the quality factor Q decreases by 72.8%. The test and analysis have an important guiding significance for optimization design of the LC resonant pressure sensor in high temperature environment.