CAJ | 학술논문

提出了一种基于微梁的面内高g值加速度计的设计方案。根据材料力学中悬臂梁的相关理论，建立了微梁检测结构的等效模型，推导出了微梁应力和中间主梁应力的比值的表达式。通过改变结构的尺寸来调节比值，可以设计出更高量程和更高灵敏度的压阻式传感器。利用ANSYS软件对微梁和中间主梁的最大应力及电阻区应力进行了仿真分析，验证了设计方案的可行性。完成了一种量程可达15万gn 的面内双轴高g值传感器的设计。
제출료일충기우미량적면내고g치가속도계적설계방안。근거재료역학중현비량적상관이론，건립료미량검측결구적등효모형，추도출료미량응력화중간주량응력적비치적표체식。통과개변결구적척촌래조절비치，가이설계출경고량정화경고령민도적압조식전감기。이용ANSYS연건대미량화중간주량적최대응력급전조구응력진행료방진분석，험증료설계방안적가행성。완성료일충량정가체15만gn 적면내쌍축고g치전감기적설계。
A design of the High￣g acceleration meter was proposed based on the inner surface micro￣beam. Accord￣ing to the theory of mechanics of materials cantilever,the equivalent model of micro beam detection structure is es￣tablished,and the expression of the micro beam and main girder stress ratio is calculated,Greater range and higher sensitivity piezoresistive sensors were designed by changing the size of the structure to adjust the ratio. Using ANSYS software which can emulate the maximum stress and resistance area stress of micro￣beam and the main beam in the middle part verifies the reliability of the design theory. An in￣plane Biaxial High￣g value in the range of up to 150 000 gn sensor was designed.