CAJ | 학술논문

借助于霍尔效应、拉曼散射、光致发光及电致发光测试技术，研究了氢等离子体处理以及随后的高温退火过程对ZnO薄膜及ZnO纳米棒光学及电学性质的影响。实验结果表明：氢在ZnO薄膜中不仅充当浅施主，而且还可以钝化晶界处缺陷相关的非辐射复合中心，从而使得载流子浓度及迁移率增大，近带边紫外发光增强。然而，钝化晶界的氢热稳定性较差，500℃时已经完全扩散出ZnO薄膜，因此，500℃退火后载流子迁移率及近带边紫外发光强度迅速减弱。
차조우곽이효응、랍만산사、광치발광급전치발광측시기술，연구료경등리자체처리이급수후적고온퇴화과정대ZnO박막급ZnO납미봉광학급전학성질적영향。실험결과표명：경재ZnO박막중불부충당천시주，이차환가이둔화정계처결함상관적비복사복합중심，종이사득재류자농도급천이솔증대，근대변자외발광증강。연이，둔화정계적경열은정성교차，500℃시이경완전확산출ZnO박막，인차，500℃퇴화후재류자천이솔급근대변자외발광강도신속감약。
T he effects of hydrogen-plasma treatment and subsequent annealing on the electrical and optical properties of ZnO were investigated by a combination of Hall measurement ,Raman scat-tering ,and photoluminescence .The results showed that hydrogen ,as shallow donor ,could also pas-sivate the non-radiative combination center related to the defects in the boundary region ,leading to in-creased carrier concentration ,higher mobility and enhanced ultra-violet emission .But the hydrogen in the boundary region was not stable ,it was released from the ZnO film at 500 °C ,causing a quick de-crease of the mobility and near band edge emission .