CAJ | 학술논문

使用迈克耳孙干涉仪通过旋转样品测量透明玻璃厚度。与白光干涉原理测薄片厚度不同，实验通过改变在光的传播路径上垂直放置的透明玻璃与光传播方向的角度，使相干光的干涉条纹发生变化，利用干涉条纹与转过角度、透明玻璃厚度之间的关系，通过实验准确测量出透明玻璃的厚度。
사용매극이손간섭의통과선전양품측량투명파리후도。여백광간섭원리측박편후도불동，실험통과개변재광적전파로경상수직방치적투명파리여광전파방향적각도，사상간광적간섭조문발생변화，이용간섭조문여전과각도、투명파리후도지간적관계，통과실험준학측량출투명파리적후도。
A rotating sample method to measure the thickness of transparent glass wafer was pro-posed using a Michelson interferometer .In comparison to the traditional method based on the interfer-ence of white beams ,the different interference fringes were generated by changing the angle between the wafer and the light .The thickness of the transparent glass wafer was accurately measured accord-ing to the changes of the fringes and the rotation angle .