CAJ | 학술논문

真空击穿是影响许多电子器件性能的一个重要因素，引起真空击穿的原因很多，其中电极的表面形态在真空击穿的起始阶段发挥着重要的作用。采用有限元法分析了不同电极表面形态对电极间电场的影响，研究表明当电极表面有凹凸缺陷时易引起击穿的发生，其中凸缺陷将导致电场强度几十倍增加，且圆锥形凸起引起的最大电场强度和尖端角度成线性关系；并进一步模拟研究了老炼对真空击穿特性的改进，结果表明老炼可将峰值电场强度降低70%以上。
진공격천시영향허다전자기건성능적일개중요인소，인기진공격천적원인흔다，기중전겁적표면형태재진공격천적기시계단발휘착중요적작용。채용유한원법분석료불동전겁표면형태대전겁간전장적영향，연구표명당전겁표면유요철결함시역인기격천적발생，기중철결함장도치전장강도궤십배증가，차원추형철기인기적최대전장강도화첨단각도성선성관계；병진일보모의연구료노련대진공격천특성적개진，결과표명노련가장봉치전장강도강저70%이상。
Vacuum breakdown is one of the important factors affecting the performance of many electronic devices. There are many reasons causing vacuum breakdown. One of them is the electrode surface shape, which plays an important role in the beginning of vacuum breakdown. The finite element method is used to analyze the effects of electrode surface shape on the electric field. Simulation results indicate that the defects on the electrode surface can easily lead to vacuum breakdown. Moreover,convex defects make the electric field strength increase dozens of times local or more,which decreases linearly with the included angle. Then further studies about the effect of burn-in show that the peak of electric field strength can be reduced by 70% or more after burn-in process.