CAJ | 학술논문

为了提高测定光学薄膜的损伤阈值的准确性．文中基于光偏转法识别薄膜损伤的模型，搭建了反射式光偏转实验测试系统，采用1？on？1法对 SiO2薄膜进行了损伤测试．研究结果表明：像元尺寸为4μm×4μm，光斑接收屏到辐照点的距离为3264．6 mm，SiO2薄膜辐照点的最小斜率变化量为1．23×10－6．当泵浦光束能量密度小于等于 SiO2薄膜的损伤阈值15 J· cm－2时，探测光斑的光强分布发生变化；当泵浦光能量密度大于薄膜损伤阈值15 J·cm－2时，探测光斑大小和样子发生改变．
위료제고측정광학박막적손상역치적준학성．문중기우광편전법식별박막손상적모형，탑건료반사식광편전실험측시계통，채용1？on？1법대 SiO2박막진행료손상측시．연구결과표명：상원척촌위4μm×4μm，광반접수병도복조점적거리위3264．6 mm，SiO2박막복조점적최소사솔변화량위1．23×10－6．당빙포광속능량밀도소우등우 SiO2박막적손상역치15 J· cm－2시，탐측광반적광강분포발생변화；당빙포광능량밀도대우박막손상역치15 J·cm－2시，탐측광반대소화양자발생개변．
In order to improve the accuracy of LIDT determination,photo?deflection experimental test system of reflective type was established based on model of photo?deflection method to identify film damage,SiO2 film damage experiment was conducted using 1?on?1 method.The results show:While pixel size is 4 μm × 4 μm,distance between receiving screen and irradiated point is 3 264.6 mm,the minimum amount of change in the slope of SiO2 film on irradiation point is 1.23 × 10 -6 .When the pump beam energy density is less than or equal to SiO2 LIDT 15 J·cm-2 ,intensity distribution of probe spot changes; While pump beam energy density is bigger than SiO2 LIDT 15 J · cm-2 ,size and appearance of detection spot change.