CAJ | 학술논문

鉴于数字全息表面粗糙度测量是对被记录的数字全息图进行数值重建获得相应的相位值，将其映射为表面轮廓值后来计算表面粗糙度参数的，分别以标准分辨率板和高度标定板为检测样本，对构建的数字全息测量系统进行了重建误差及重复性测试，包括横向尺寸误差及高度误差，横向尺寸重建误差及重复误差分别为1．11％和0．61％，高度重建误差及重复误差分别为11％和1．8％。以宽带介质膜平面反射镜为样本，测得其3段评定长度（包含15个取样长度）的表面粗糙度平均值分别为0．01037μm、0．01033μm和0．00967μm。
감우수자전식표면조조도측량시대피기록적수자전식도진행수치중건획득상응적상위치，장기영사위표면륜곽치후래계산표면조조도삼수적，분별이표준분변솔판화고도표정판위검측양본，대구건적수자전식측량계통진행료중건오차급중복성측시，포괄횡향척촌오차급고도오차，횡향척촌중건오차급중복오차분별위1．11％화0．61％，고도중건오차급중복오차분별위11％화1．8％。이관대개질막평면반사경위양본，측득기3단평정장도（포함15개취양장도）적표면조조도평균치분별위0．01037μm、0．01033μm화0．00967μm。
Surface roughness measurement based on digital holography was carried out . The tested surface roughness parameters were calculated from the surface profile which was mapped from the reconstructed phase distribution of digital hologram .Firstly ,the standard calibration plate and high‐resolution panel w ere taken as the tested samples to reconstruct errors and test the repeatability of the digital holography measurement system ,involving the lateral size error and the height error . The reconstruction error and repeatability error for lateral size were 1 .11% ,0 .61% ,respectively .And the errors for height were 11% ,1 .8% ,respectively .Then an ordinary coated reflector was taken as a sample , and its surface roughness values along 3 segments of evaluation length were 0 .010 37 μm ,0 .010 33 μm ,and 0 .009 67 μm ,respectively (15 sampling lengths) .