CAJ | 학술논문

为了增强高精度曲率半径测量仪器的抗环境干扰能力，满足现场使用需求，研制了一套基于光栅尺测长的激光差动共焦曲率半径测量系统。该系统利用差动共焦轴向光强响应曲线的过零点对应系统物镜聚焦焦点这一特性，对被测样品的猫眼位置及共焦位置进行精确瞄准定位，并借助光栅尺测长得到透镜猫眼位置与共焦位置之间的距离，实现曲率半径的测量。实验表明，该系统相对测量精度优于5×10－6，满足高精度曲率半径测量的精度需求。
위료증강고정도곡솔반경측량의기적항배경간우능력，만족현장사용수구，연제료일투기우광책척측장적격광차동공초곡솔반경측량계통。해계통이용차동공초축향광강향응곡선적과영점대응계통물경취초초점저일특성，대피측양품적묘안위치급공초위치진행정학묘준정위，병차조광책척측장득도투경묘안위치여공초위치지간적거리，실현곡솔반경적측량。실험표명，해계통상대측량정도우우5×10－6，만족고정도곡솔반경측량적정도수구。
In order to enhance the environmental anti‐interference capability for the radius of curvature (ROC) measurement and meet the requirements of use on the production spot ,a la‐ser differential confocal curvature measurement system with grating was developed ,which used the property ,that the zero point of a differential confocal intensity curve corresponds to the focus of objective ,to precisely identify the cat‐eye and confocal positions of the tested lens , and then used the grating to measure the distance between these two positions ,thereby the high‐precision measurement of ROC was achieved .Experimental results show that the system has an accuracy of better than 5 × 10-6 .So it can meet the demand of high‐precision measure‐ment of ROC .