CAJ | 학술논문

结合岛膜结构电容式压力传感器高灵敏度和凹槽结构电容式压力传感器较好线性度的优点，设计了一种倒岛膜凹槽电容式压力传感器，并根据其结构特点建立了倒岛膜凹槽电容式压力传感器的理论模型，使用FEA（有限元分析）法分析了传感器的电容-压力特性。结果表明，设计的倒岛膜凹槽电容式压力传感器具有较好的测量特性，其测量灵敏度和线性度分别为0.00512 fF/Pa和0.98178。与相同设计参数的岛膜或凹槽电容式压力传感器相比，该传感器较好地缓解了测量灵敏度和线性度之间的矛盾问题。
결합도막결구전용식압력전감기고령민도화요조결구전용식압력전감기교호선성도적우점，설계료일충도도막요조전용식압력전감기，병근거기결구특점건립료도도막요조전용식압력전감기적이론모형，사용FEA（유한원분석）법분석료전감기적전용-압력특성。결과표명，설계적도도막요조전용식압력전감기구유교호적측량특성，기측량령민도화선성도분별위0.00512 fF/Pa화0.98178。여상동설계삼수적도막혹요조전용식압력전감기상비，해전감기교호지완해료측량령민도화선성도지간적모순문제。
A novel capacitive pressure sensor with the inverted island film-grooves was designed, which combined the high sensitivity of the capacitive pressure sensor with the inverted island film and better linearity of the capacitive pressure sensor with grooves. The theoretical model of the capacitive pressure sensor with the inverted island film-grooves was proposed based on the structure of the capacitive pressure sensor. The performance of the capacitive pressure sensor with the inverted island film-grooves was analyzed by using FEA (finite element analysis) method. The results show that the measuring sensitivity and linearity of the capacitive pressure sensor with the inverted island film-grooves could reach 0.005 12 fF/Pa and 0.981 78. The capacitive pressure sensor with the inverted island film-grooves possesses better measuring characteristics, compared with the capacitive pressure sensor of the island film or grooves with same structure parameters, the contradiction between the measuring sensitivity and linearity is released in this sensor.