电子元件与材料
電子元件與材料
전자원건여재료
ELECTRONIC COMPONENTS & MATERIALS
2014年
12期
33-36
,共4页
洪敦华%高敏%黄振龙%张胤%林媛
洪敦華%高敏%黃振龍%張胤%林媛
홍돈화%고민%황진룡%장윤%림원
薄膜%高分子辅助沉积法%LBCO%小极化子%电输运性质%氧敏性质
薄膜%高分子輔助沉積法%LBCO%小極化子%電輸運性質%氧敏性質
박막%고분자보조침적법%LBCO%소겁화자%전수운성질%양민성질
thin films%polymer-assisted deposition technique%LBCO%small polaron%electrical transport property%oxygen sensitive property
采用高分子辅助沉积法制备了Si基LaBaCo2O5+δ( LBCO)薄膜,主要研究了Si基LBCO薄膜的电输运性质及氧敏性质。通过对LBCO薄膜的电输运性质研究,发现LaBaCo2O5+δ薄膜的激活能Ea为0.32 eV,远小于同类体材料PrBaCo2O5+δ激活能(Ea=0.67 eV),说明将材料薄膜化以后,有利于降低材料的激活能;此外,LBCO薄膜阻-温曲线满足小极化子热激化跳跃理论,证明该材料的导电机制是小极化子电子电导。氧敏性质研究发现,在较低的温度356℃下,当测试气体从氢气切换到氧气时,薄膜电阻从3×105Ω迅速下降到4.5×102Ω(ΔR≈3.0×105Ω),响应时间为4.2 s,说明在较低温度下,LBCO薄膜对氧气具有较高的敏感度。同时,发现LBCO薄膜材料导电能力并不与氧气的浓度成正比。
採用高分子輔助沉積法製備瞭Si基LaBaCo2O5+δ( LBCO)薄膜,主要研究瞭Si基LBCO薄膜的電輸運性質及氧敏性質。通過對LBCO薄膜的電輸運性質研究,髮現LaBaCo2O5+δ薄膜的激活能Ea為0.32 eV,遠小于同類體材料PrBaCo2O5+δ激活能(Ea=0.67 eV),說明將材料薄膜化以後,有利于降低材料的激活能;此外,LBCO薄膜阻-溫麯線滿足小極化子熱激化跳躍理論,證明該材料的導電機製是小極化子電子電導。氧敏性質研究髮現,在較低的溫度356℃下,噹測試氣體從氫氣切換到氧氣時,薄膜電阻從3×105Ω迅速下降到4.5×102Ω(ΔR≈3.0×105Ω),響應時間為4.2 s,說明在較低溫度下,LBCO薄膜對氧氣具有較高的敏感度。同時,髮現LBCO薄膜材料導電能力併不與氧氣的濃度成正比。
채용고분자보조침적법제비료Si기LaBaCo2O5+δ( LBCO)박막,주요연구료Si기LBCO박막적전수운성질급양민성질。통과대LBCO박막적전수운성질연구,발현LaBaCo2O5+δ박막적격활능Ea위0.32 eV,원소우동류체재료PrBaCo2O5+δ격활능(Ea=0.67 eV),설명장재료박막화이후,유리우강저재료적격활능;차외,LBCO박막조-온곡선만족소겁화자열격화도약이론,증명해재료적도전궤제시소겁화자전자전도。양민성질연구발현,재교저적온도356℃하,당측시기체종경기절환도양기시,박막전조종3×105Ω신속하강도4.5×102Ω(ΔR≈3.0×105Ω),향응시간위4.2 s,설명재교저온도하,LBCO박막대양기구유교고적민감도。동시,발현LBCO박막재료도전능력병불여양기적농도성정비。
The LaBaCo2O5+δ (LBCO) thin films were deposited on Si(001) substrates by the polymer-assisted deposition technique. The electrical transport properties and oxygen sensitive properties of LBCO thin films on Si substrate were studied. It is found that the activation energy (Ea=0.32 eV) of LBCO films is far less than that of the similar bulk material of PrBaCo2O5+δ(Ea=0.67 eV), which confirmed that preparing thin film is helpful to reduce the active energy of this material. The resistivity-temperature curve of the films demonstrates that the conductive mechanism of LBCO films is small polaron electronic conductivity. The drastic changes of films resistance (from 3×105Ω to 4.5×102Ω) with the switch of redox (O2-H2) environment within such a short time (4.2 s), at such a low temperature 356℃, indicates that LBCO films possess an excellent oxygen sensitive property. Simultaneously, the electrical conductivity of LBCO thin film is not proportional to the concentration of oxygen.