CAJ | 학술논문

采用溶胶-凝胶旋涂法并结合氢气还原工艺，在Si(001)基片上制备了FeCo/SiO2复合薄膜，利用X射线衍射、原子力显微镜和振动样品磁强计研究了 SiO2含量对薄膜样品的结构、形貌和磁性能的影响。结果表明，随着SiO2含量的增加，FeCo/SiO2薄膜中FeCo的晶粒尺寸减小，样品的矫顽力呈现先略有降低然后增加的趋势。当w(SiO2)低于43%时，FeCo具有较明显的(200)晶面择优取向。当w(SiO2)为23%时，FeCo的(200)晶面择优取向度最高，样品的矫顽力最小，复合薄膜具有较好的软磁性能和较大的垂直磁晶各向异性。
채용용효-응효선도법병결합경기환원공예，재Si(001)기편상제비료FeCo/SiO2복합박막，이용X사선연사、원자력현미경화진동양품자강계연구료 SiO2함량대박막양품적결구、형모화자성능적영향。결과표명，수착SiO2함량적증가，FeCo/SiO2박막중FeCo적정립척촌감소，양품적교완력정현선략유강저연후증가적추세。당w(SiO2)저우43%시，FeCo구유교명현적(200)정면택우취향。당w(SiO2)위23%시，FeCo적(200)정면택우취향도최고，양품적교완력최소，복합박막구유교호적연자성능화교대적수직자정각향이성。
FeCo/SiO2 thin films were fabricated using a sol-gel spin-coating method combined with hydrogen reduction process on Si(001) substrates. Effects of SiO2 content on structures, morphologies and magnetic properties of the samples were investigated by X-ray diffraction (XRD), atomic force microscopy (AFM) and vibrating sample magnetometer (VSM). The results indicate that with increase of SiO2 content, the average size of FeCo grains in the FeCo/SiO2 thin films decreases, while the coercivity of the samples firstly decreases slightly and then increases. FeCo exhibits a pronounced preferential orientation of (200) plane when w(SiO2) is lower than 43%. The sample has the strongest preferential orientation of FeCo(200) plane and minimum coercivity value when w(SiO2) is 23%, indicating a good soft magnetic properties and high perpendicular magneto-crystalline anisotropy.