CAJ | 학술논문

为了实现高精度大口径平行光管波前检测，评价平行光管出射波前质量，提出了采用差分五棱镜扫描波前检测方法检测平行光管。该方法为五棱镜扫描法的优化方法，通过测量波前斜率的改变得到波前曲率的信息来重构波前，从而消除由于五棱镜扫描法波前检测中质心标定不准确而引入的倾斜和离焦的误差量。通过搭建差分五棱镜扫描法波前检测系统验证了此方法的可行性，并给出差分五棱镜扫描法误差分析说明此方法可靠性。误差分析表明，该方法检测精度可以达到10.54 nm；实验结果表明，该方法相比于五棱镜扫描法分别在波面峰谷值（ PV）和均方根值（ RMS）的重复性精度上提高了74.41％和125.81％。该方法基本满足平行光管波前检测精度高、稳定性好的要求，可以客观准确地评价平行光管出射波前质量。
위료실현고정도대구경평행광관파전검측，평개평행광관출사파전질량，제출료채용차분오릉경소묘파전검측방법검측평행광관。해방법위오릉경소묘법적우화방법，통과측량파전사솔적개변득도파전곡솔적신식래중구파전，종이소제유우오릉경소묘법파전검측중질심표정불준학이인입적경사화리초적오차량。통과탑건차분오릉경소묘법파전검측계통험증료차방법적가행성，병급출차분오릉경소묘법오차분석설명차방법가고성。오차분석표명，해방법검측정도가이체도10.54 nm；실험결과표명，해방법상비우오릉경소묘법분별재파면봉곡치（ PV）화균방근치（ RMS）적중복성정도상제고료74.41％화125.81％。해방법기본만족평행광관파전검측정도고、은정성호적요구，가이객관준학지평개평행광관출사파전질량。
In order to realize the high precise wavefront test of large-aperture collimator and evaluate its wave-front quality, the method of differential pentaprism scanning wavefront detection is proposed in this paper. This method is the optimization of pentaprism scanning detection.Firstly, the information of wavefront curva-ture is obtained by measuring wavefront slope change to reconstruct the wavefront.The title and defocus error instructed by inaccurate calibration of center of mass are eliminated.Secondly, the differential pentaprism scanning wavefront detection system is established to verify the feasibility of this method.Lastly, the error a-nalysis is given.The error analysis shows that the testing precise of this method is 10.54 nm.The experimen-tal results show that the repeatability precisions of wave peak and valley value ( PV ) and root mean square ( RMS) are increased by 74.41% and 125.81% compared with pentaprism scanning method.This method basically meets the requirements of high accuracy and good stability for collimator wavefront detection, which can be used to evaluate the quality of collimator wavefront.