中国光学
中國光學
중국광학
CHINESE JOURNAL OF OPTICS
2014年
6期
975-981
,共7页
光学加工%离轴非球面%双摆法%4测杆法
光學加工%離軸非毬麵%雙襬法%4測桿法
광학가공%리축비구면%쌍파법%4측간법
optical manufacture%off-axis aspheric surface%double-swing%4-pole method
介绍了一种轻质矩形离轴非球面反射镜的加工与检测方法。针对矩形离轴非球面镜这种直角效应的加工难点,提出双摆式加工工艺,并设计改造双摆式加工机床使该方法得以实现。采用该方法加工完成某多光谱仪光学系统中4块矩形离轴非球面反射镜(其中最大尺寸为266 mm ×110 mm),最终加工得到的面形精度均优于0.020λ(RMS,@633 mm)的设计指标要求。加工结果表明,用该加工技术既提高了光学加工效率又利于得到较为平滑的面形质量。
介紹瞭一種輕質矩形離軸非毬麵反射鏡的加工與檢測方法。針對矩形離軸非毬麵鏡這種直角效應的加工難點,提齣雙襬式加工工藝,併設計改造雙襬式加工機床使該方法得以實現。採用該方法加工完成某多光譜儀光學繫統中4塊矩形離軸非毬麵反射鏡(其中最大呎吋為266 mm ×110 mm),最終加工得到的麵形精度均優于0.020λ(RMS,@633 mm)的設計指標要求。加工結果錶明,用該加工技術既提高瞭光學加工效率又利于得到較為平滑的麵形質量。
개소료일충경질구형리축비구면반사경적가공여검측방법。침대구형리축비구면경저충직각효응적가공난점,제출쌍파식가공공예,병설계개조쌍파식가공궤상사해방법득이실현。채용해방법가공완성모다광보의광학계통중4괴구형리축비구면반사경(기중최대척촌위266 mm ×110 mm),최종가공득도적면형정도균우우0.020λ(RMS,@633 mm)적설계지표요구。가공결과표명,용해가공기술기제고료광학가공효솔우리우득도교위평활적면형질량。
A kind of manufacturing and testing method for rectangular off-axis aspheric lightweight mirror is in-troduced.In order to overcome the corner effect, double-swing polishing( DSP) method is proposed.A DSP machine is made to achieve satisfying manufacturing result.The DSP and the 4-pole method are successfully applied for manufacturing optical system in the spectrometer.Four rectangular off-axis aspheric mirrors with the largest size of 266 mm ×110 mm are polished, and the final surface precision figures are better than 0.020λ( RMS,@633 nm) .Manufacturing result shows that the double-swing polishing method improves the polishing efficiency and reduces the optical surface medium frequency error.