CAJ | 학술논문

通过溶胶-凝胶法制备了折射率连续可调的Si O 2薄膜，并将其应用于制备双层宽频增透膜。以正硅酸乙酯为前驱体，分别以盐酸和氨水为催化剂制备酸催化SiO2溶胶和碱催化 SiO2溶胶；将酸催化和碱催化的Si O 2溶胶按不同比例进行混合制得酸碱混合SiO2溶胶，最后通过浸渍-提拉法在 K9玻璃上制备SiO2薄膜。椭偏仪测试结果表明 SiO2薄膜的折射率在1.18~1.44之间连续可调，折射率随着酸催化SiO2溶胶比例的增加而增加。分别以折射率为1.41和1.18的SiO2薄膜为底层和上层，成功制备出在527和1053 nm处同时高增透的双层宽频增透膜。最后，以六甲基二硅氮烷为修饰剂，通过增透膜表面的有机修饰，提高了宽频增透膜的疏水性和耐环境性。
통과용효-응효법제비료절사솔련속가조적Si O 2박막，병장기응용우제비쌍층관빈증투막。이정규산을지위전구체，분별이염산화안수위최화제제비산최화SiO2용효화감최화 SiO2용효；장산최화화감최화적Si O 2용효안불동비례진행혼합제득산감혼합SiO2용효，최후통과침지-제랍법재 K9파리상제비SiO2박막。타편의측시결과표명 SiO2박막적절사솔재1.18~1.44지간련속가조，절사솔수착산최화SiO2용효비례적증가이증가。분별이절사솔위1.41화1.18적SiO2박막위저층화상층，성공제비출재527화1053 nm처동시고증투적쌍층관빈증투막。최후，이륙갑기이규담완위수식제，통과증투막표면적유궤수식，제고료관빈증투막적소수성화내배경성。
Abrstract:Silica thin films with controllable refractive index were prepared by sol-gel process,and used for preparation of broadband antireflective (AR)coating.Acid-catalyzed and base-catalyzed silica sols were pre-pared by using TEOS as precursor and HCl and ammonia as catalysts,respectively.The mixed silica sols with different content of acid-catalyzed silica were prepared by mixing acid-catalyzed and base-catalyzed silica sols to-gether.The resultant silica thin films on K9 substrates were prepared by the dip-coating process.It was found that the silica thin films possessed controllable refractive index from 1.18 to 1.44.A broadband AR coating ef-fective simultaneously at 527 and 1 053 nm was prepared by using silica thin films with refractive index of 1.41 and 1 .1 8 as bottom and upper layers,respectively.Finally,the hydrophobicity and environment-resistance of broadband AR coating were improved after the surface modification of AR coating with hexamethyldisiloxane (HMDS)as modifier.