仪器仪表学报
儀器儀錶學報
의기의표학보
CHINESE JOURNAL OF SCIENTIFIC INSTRUMENT
2014年
11期
2458-2465
,共8页
安慰宁%张福民%吴翰钟%曲兴华
安慰寧%張福民%吳翰鐘%麯興華
안위저%장복민%오한종%곡흥화
飞秒光频梳%绝对测距%频域干涉%光谱
飛秒光頻梳%絕對測距%頻域榦涉%光譜
비초광빈소%절대측거%빈역간섭%광보
femtosecond optical frequency%absolute distance measurement%frequency domain interference%spectrum
飞秒光频梳(光梳)在激光测距领域有着重要应用。本文研究基于飞秒光频梳的频域干涉绝对测距技术,提出了一种新的基于傅里叶变换的频域峰值间隔测距方法,分析了测距原理并进行了多组绝对测距实验。实验结果表明通过频域峰值间隔测距可以实现绝对测距,被测距离1.2 mm时测距精度最高,最大误差?12 nm。在光谱的分析处理上,提出一种基于复小波变换的相位斜率测距的方法。结果表明相位斜率测距法可以实现距离信息的提取,在被测距离1.2 mm时测距精度最高,最大误差?16 nm。最后与经典傅里叶分析法进行了比较,比较结果表明频域峰值间隔测距法得到的实验结果精度好于相位斜率测距法和傅里叶分析法。
飛秒光頻梳(光梳)在激光測距領域有著重要應用。本文研究基于飛秒光頻梳的頻域榦涉絕對測距技術,提齣瞭一種新的基于傅裏葉變換的頻域峰值間隔測距方法,分析瞭測距原理併進行瞭多組絕對測距實驗。實驗結果錶明通過頻域峰值間隔測距可以實現絕對測距,被測距離1.2 mm時測距精度最高,最大誤差?12 nm。在光譜的分析處理上,提齣一種基于複小波變換的相位斜率測距的方法。結果錶明相位斜率測距法可以實現距離信息的提取,在被測距離1.2 mm時測距精度最高,最大誤差?16 nm。最後與經典傅裏葉分析法進行瞭比較,比較結果錶明頻域峰值間隔測距法得到的實驗結果精度好于相位斜率測距法和傅裏葉分析法。
비초광빈소(광소)재격광측거영역유착중요응용。본문연구기우비초광빈소적빈역간섭절대측거기술,제출료일충신적기우부리협변환적빈역봉치간격측거방법,분석료측거원리병진행료다조절대측거실험。실험결과표명통과빈역봉치간격측거가이실현절대측거,피측거리1.2 mm시측거정도최고,최대오차?12 nm。재광보적분석처리상,제출일충기우복소파변환적상위사솔측거적방법。결과표명상위사솔측거법가이실현거리신식적제취,재피측거리1.2 mm시측거정도최고,최대오차?16 nm。최후여경전부리협분석법진행료비교,비교결과표명빈역봉치간격측거법득도적실험결과정도호우상위사솔측거법화부리협분석법。
Femtosecond optical frequency comb has been widely applied in both basic science and industrical manufacturing. The principle of frequency-domain interference using frequency comb is analyzed for absolute distance measurement. A frequency domain peak-to-peak interval measurement method based on Fourier transform is proposed. Experimental results show that the maximum deviation is-12 nm at the distance of about 1.2 mm. An approach of the slope of the spectral phase based on the complex wavelet transform is demonstrated for distance metrology, and the experimental results show that the maximum deviation is-16 nm at the distance of about 1.2 mm. The above two methods are compared with the method based on classical Fourier transform. The comparison results show that the frequency-domain peak-to-peak interval can achieve a higher precision, and the technique based on the complex wavelet transform can improve the accuracy of Fourier transform.