CAJ | 학술논문

为改善基于扫描电镜微纳遥操作系统的力觉临场感与稳定性，针对微纳遥操作系统提出一种基于滑模的阻抗控制策略。主操作手端应用阻抗控制策略，以提高主操作手的顺应性；从操作手端采用基于滑模的阻抗控制策略，解决从操作手端参数的不确定性问题。由于实现上述控制策略需要的微分控制信号难以直接获取，故在主/从控制策略中结合跟踪微分器技术进行在线获取。针对微纳遥操作系统工作于低频带，具有极大的力反馈增益(105以上)特点，利用 Liewellyn稳定判据推导出小延时下系统稳定条件。仿真和实验表明：所提出控制策略具有良好的鲁棒性，能够提供精确的力觉临场感。位置跟踪阶段最大位移误差小于0.5μm；接触阶段操作者能够精确地感知从操作手端1μN接触力。
위개선기우소묘전경미납요조작계통적력각림장감여은정성，침대미납요조작계통제출일충기우활모적조항공제책략。주조작수단응용조항공제책략，이제고주조작수적순응성；종조작수단채용기우활모적조항공제책략，해결종조작수단삼수적불학정성문제。유우실현상술공제책략수요적미분공제신호난이직접획취，고재주/종공제책략중결합근종미분기기술진행재선획취。침대미납요조작계통공작우저빈대，구유겁대적력반궤증익(105이상)특점，이용 Liewellyn은정판거추도출소연시하계통은정조건。방진화실험표명：소제출공제책략구유량호적로봉성，능구제공정학적력각림장감。위치근종계단최대위이오차소우0.5μm；접촉계단조작자능구정학지감지종조작수단1μN접촉력。
In order to improve the tele-presence and stability of a scanning electron microscopy (SEM) based micro/nano tele-operation system, a sliding mode based impedance control scheme was proposed. Such a scheme features that impedance con-trol strategy was applied to master to fulfill compliant control and sliding mode based impedance control strategy was adopted to slave to solve the parameter uncertainty problem. Tracking differentiator technology was integrated to the master/slave control strategy to obtain the derivative control signal of the micro/nano teleoperation system. Under the circumstance of low band and large gain of force feedback (105), the stability condition of micro/nano teleoperation system was derived from Liewellyn criterion. The good robustness and accurate force tele-presence of the proposed sliding mode control approach were verified by simulation and experimental results. The maximum displacement error is less than 0.5μm during the location tracking process. The operator can precisely perceive 1μN contact force from the slave.