CAJ | 학술논문

针对光栅测长在指示表检定仪上的应用缺陷，提出了一种光栅位移高精度细分的软件实现方法，在STM32上编程对光栅的两路正交正弦信号进行采集和分析，实现莫尔条纹可逆计数和细分。该方法省去了计数和细分的外围硬件电路，使得系统简单可靠、成本低。通过对栅距为20μm的光栅进行200细分的实验研究，并采用Renishaw激光干涉仪检验该方法的细分精度，结果表明其精度满足要求。
침대광책측장재지시표검정의상적응용결함，제출료일충광책위이고정도세분적연건실현방법，재STM32상편정대광책적량로정교정현신호진행채집화분석，실현막이조문가역계수화세분。해방법성거료계수화세분적외위경건전로，사득계통간단가고、성본저。통과대책거위20μm적광책진행200세분적실험연구，병채용Renishaw격광간섭의검험해방법적세분정도，결과표명기정도만족요구。
Aimed at the shortcoming in application of grating in calibrator of dial gauge,a method to subdivide grating displace-ment with high precision was proposed which is realized via software. Through programming on STM32,the two orthogonal sinusoidal signals on grating were sampled and analyzed to achieve reversible counting and subdivision of moire fringe. The great advantage of method was the needless of counting and subdividing circuit thus making the system simple,reliable and cost-effective. An experiment research was conducted to subdividing the 20 μm raster pitch into 200 folds,and Renishaw laser interferometer test demonstrated the precision of the method. The results show that the precision meets the requirement.