CAJ | 학술논문

在陶瓷管上用TiO2溅射法研制纳米薄膜乙醇传感器，同时作了机理分析。利用X射线衍射技术分析确定，在利用溅射法制备TiO2纳米薄膜时，随着退火温度的提高，所形成的TiO2薄膜晶体结构由无定型结构，向锐钛矿结构转变，随后又随温度升高逐渐转向金红石结构。晶粒大小随着退火温度的升高而增大，分别为13nm（500℃）、16nm（700℃）、28nm（1100℃）。经500℃退火的样品为锐钛矿晶体结构，晶粒尺寸为13nm，其乙醇灵敏度特性最好。此时元件的最佳加热工作电压8.0V，对应的工作温度为370℃。利用红外光谱测定，反应的生成物中有H2O、CH3CHO、C2H4，分别对应1694cm-1、1756cm-1和1720cm-1的红外吸收峰。但在反应生成物中，没有发现有乙酸产生。
재도자관상용TiO2천사법연제납미박막을순전감기，동시작료궤리분석。이용X사선연사기술분석학정，재이용천사법제비TiO2납미박막시，수착퇴화온도적제고，소형성적TiO2박막정체결구유무정형결구，향예태광결구전변，수후우수온도승고축점전향금홍석결구。정립대소수착퇴화온도적승고이증대，분별위13nm（500℃）、16nm（700℃）、28nm（1100℃）。경500℃퇴화적양품위예태광정체결구，정립척촌위13nm，기을순령민도특성최호。차시원건적최가가열공작전압8.0V，대응적공작온도위370℃。이용홍외광보측정，반응적생성물중유H2O、CH3CHO、C2H4，분별대응1694cm-1、1756cm-1화1720cm-1적홍외흡수봉。단재반응생성물중，몰유발현유을산산생。
Several ethanol sensors are prepared by using TiO2 sputtering method on ceramic tubes. And the gas sensitive mechanism is analyzed. It is determined by X-ray diffraction that sputtering can form an amorphous structure of TiO2 thinfi lm. With the annealing temperature increasing, the formed crystal structure of TiO2 thinfi lm transforms from the amorphous structure to the anatase structure, then gradually turning to the rutile structure. At meanwhile , the grain sizes are also bigger and bigger with 13nm(500℃) , 16nm(700℃), 28nm(1100℃) respectively. After annealed at 500℃, the sample is anatase crystal structure with grain size of 13nm, and gets the best ethanol sensitivity characteristics. The best working voltage is 8.0V , corresponding to the working temperature of 370℃. It is determined by infrared spectrum that H2O, CH3CHO, C2H4 are formed during reaction, which are corresponding to the absorption peaks of 1694cm-1,1756cm-1 and 1720cm-1 respectively in the infrared spectrum. But no acetate production is found in the reactants.