CAJ | 학술논문

提出了一种利用三个CCD探测三路准直光束位置以实现被测物六自由度测量的方法。测量系统包括两部分：一个反射镜和通过连接杆连接的两个CCD为移动部分，固接在被测物上；固定部分的光源、光开关和三个光学准直器产生三路准直光束。其中两路分别投射到两个CCD上，第三路经移动部分的反射镜反射回并由第三个CCD探测。被测物发生六自由度变化时，移动部分同步变化，三个CCD探测的光斑位置也随之变化，通过特定算法可解算出被测物六自由度运动。构建了一个可以表征六自由度测量特性的四自由度测量系统。测量结果表明：在相应测量范围内，与双频激光干涉仪或光电自准直仪测量值相比，系统偏摆角最大差值为1.27＂，滚转角最大偏差为1.03＂，两个平动位移最大偏差均小于1μm。
제출료일충이용삼개CCD탐측삼로준직광속위치이실현피측물륙자유도측량적방법。측량계통포괄량부분：일개반사경화통과련접간련접적량개CCD위이동부분，고접재피측물상；고정부분적광원、광개관화삼개광학준직기산생삼로준직광속。기중량로분별투사도량개CCD상，제삼로경이동부분적반사경반사회병유제삼개CCD탐측。피측물발생륙자유도변화시，이동부분동보변화，삼개CCD탐측적광반위치야수지변화，통과특정산법가해산출피측물륙자유도운동。구건료일개가이표정륙자유도측량특성적사자유도측량계통。측량결과표명：재상응측량범위내，여쌍빈격광간섭의혹광전자준직의측량치상비，계통편파각최대차치위1.27＂，곤전각최대편차위1.03＂，량개평동위이최대편차균소우1μm。
Using 3 CCDs to detect the position changes of 3 collimated beams, a six﹣degree﹣of﹣freedom measurement method was presented. The measurement system consisted of two parts. A mirror and two CCDs that were connected together by a link rod form the moving part. It was fixed to and moving along with the measured object. A light source, an optical switch and three optical collimators of the fixed part emitted 3 collimated beams. Two collimated beams projected on two CCDs respectively. The third one was reflected back by the mirror and captured by the third CCD. Six﹣degree﹣of﹣freedom motion of the measured object led to the synchronous change of the moving part, resulting in position changes of 3 light spots on CCDs. Then with a set of algorithms, the six﹣degree﹣of﹣freedom motion of the measured object can be calculated based on these position changes. A four﹣degree﹣of﹣freedom measurement system, which can manifest the characteristics of six﹣degree﹣of﹣freedom measurement, was built and experimental tests were carried out. Within the corresponding measurement range, compared with the results of the dual﹣frequency laser interferometer and photoelectric auto﹣collimator system, the maximum deviations of yaw and roll in this system are 1 . 27" and 1 . 03", and that of two translational movements are less than 1μm.