CAJ | 학술논문

采用脉冲辉光放电等离子体气相沉积法在316不锈钢表面沉积膜层较厚的类金刚石膜层。利用拉曼光谱仪（Raman）、X射线光电子能谱仪（XPS）、傅里叶变换红外光谱仪（FT-IR）、光学显微镜、显微硬度计和摩擦磨损实验机分别对膜层组成和微观结构及机械性能进行了表征。研究发现,通过脉冲辉光放电等离子体气相沉积法,在316不锈钢表面制备的类金刚石膜层光滑致密;Raman分析得到的ID/IG和IT/IG比值分别为0.72和0.22;FT-IR分析可知膜层含有较多的CHx组成的sp3键;摩擦磨损试验得到膜层的摩擦系数低至0.100,XPS分析膜层sp3含量高达60.7%和光学显微镜测量膜层的厚度达到7mm。由此可知沉积类金刚石膜层后,可以显著地改善316不锈钢表面的机械性能。
채용맥충휘광방전등리자체기상침적법재316불수강표면침적막층교후적류금강석막층。이용랍만광보의（Raman）、X사선광전자능보의（XPS）、부리협변환홍외광보의（FT-IR）、광학현미경、현미경도계화마찰마손실험궤분별대막층조성화미관결구급궤계성능진행료표정。연구발현,통과맥충휘광방전등리자체기상침적법,재316불수강표면제비적류금강석막층광활치밀;Raman분석득도적ID/IG화IT/IG비치분별위0.72화0.22;FT-IR분석가지막층함유교다적CHx조성적sp3건;마찰마손시험득도막층적마찰계수저지0.100,XPS분석막층sp3함량고체60.7%화광학현미경측량막층적후도체도7mm。유차가지침적류금강석막층후,가이현저지개선316불수강표면적궤계성능。
The thick diamondlike carbon （DLC） films were deposited on 316 stainless steel by pulsed glow dis charge plasma vapor deposition （PGDVD） and cathodic arc discharge method （CAD）. The composition ,micro structure and mechanical property of the films were investigated by Raman spectroscopy, Xray photoelectron spectroscopy （XPS）,optical microscope, microscopic hardness meter and friction wear testing machine. It was found that the DLC films were improved owing to the compact structure and smooth surface. The G peak and D peak showed a move to a higher wave,the ID/IG and IT/IG intensity rate were 0. 72 and 0.22, respectively. FT IR analysis showed that the film contains more CHx key component of spa ; the friction coefficient reached 0. 100 and the spa content was 60.7X and the thickness was 7mm in film. The mechanical hardness and the frictional surfaces trail of the DLC film were also meaasured