CAJ | 학술논문

采用近空间升华法在FTO玻璃衬底上制备CdZnTe多晶厚膜,并采用扫描电镜（SEM）、能谱仪（EDS）、X射线衍射仪（XRD）、紫外-可见光谱仪、I-V测试仪等对CdZnTe厚膜的表面形貌、成分、结构以及光电性能进行分析表征。结果表明,所制备的CdZnTe膜均匀致密,随生长时间的延长,晶粒尺寸明显增大;不同厚度的CdZnTe膜均表现出沿（111）晶面的择优生长;CdZnTe厚膜的禁带宽度在1.53～1.56eV之间;电阻率在1010Ω.cm数量级,具有较好的光电响应,试制的薄膜探测器可用作计数型探测器。
채용근공간승화법재FTO파리츤저상제비CdZnTe다정후막,병채용소묘전경（SEM）、능보의（EDS）、X사선연사의（XRD）、자외-가견광보의、I-V측시의등대CdZnTe후막적표면형모、성분、결구이급광전성능진행분석표정。결과표명,소제비적CdZnTe막균균치밀,수생장시간적연장,정립척촌명현증대;불동후도적CdZnTe막균표현출연（111）정면적택우생장;CdZnTe후막적금대관도재1.53～1.56eV지간;전조솔재1010Ω.cm수량급,구유교호적광전향응,시제적박막탐측기가용작계수형탐측기。
Polycrystalline CdZnTe thick films were deposited on glass substrates via close-spaced sublimation (CSS) technique. The morphology, composition, micro-structure, optical and electrical properties of CdZnTe thick films were investigated by SEM, EDS, XRD, UV spectrophotometer and I-V measurements. It is found that the grains are uniform, also, the grain sizes increase significantly with increasing deposition time. The XRD results show that all the thick films possess cubic structure, and tend to grow along the orientation of (111) face. The optical energy gap of all the thick films are in the region of 1.53-1.56eV. The resistivity of the films are 10^10Ω cm orders of magnitude, and have good optical response. It can be used for counting detectors.