CAJ | 학술논문

采用射频磁控溅射法在Si衬底和玻璃衬底上制备了ZnO/Ti薄膜,利用紫外-可见分光光度计和荧光分光光度计等技术表征了ZnO/Ti薄膜的光学特性,研究了Ti缓冲层的厚度对ZnO薄膜的影响。透射吸收光谱显示所有ZnO薄膜在可见光区域的平均透过率超过80%,当引入缓冲层后,薄膜的紫外吸收边先向长波方向移动,且随着缓冲层厚度的增加紫外吸收边向短波方向移动。薄膜的荧光光谱显示,所有样品出现了位于390nm的紫外发光峰,435和487nm的蓝光双峰以及525nm的绿光峰,并对各发光峰的来源进行了探讨。
채용사빈자공천사법재Si츤저화파리츤저상제비료ZnO/Ti박막,이용자외-가견분광광도계화형광분광광도계등기술표정료ZnO/Ti박막적광학특성,연구료Ti완충층적후도대ZnO박막적영향。투사흡수광보현시소유ZnO박막재가견광구역적평균투과솔초과80%,당인입완충층후,박막적자외흡수변선향장파방향이동,차수착완충층후도적증가자외흡수변향단파방향이동。박막적형광광보현시,소유양품출현료위우390nm적자외발광봉,435화487nm적람광쌍봉이급525nm적록광봉,병대각발광봉적래원진행료탐토。
ZnO films using different thick Ti buffer layers were deposited on Si and glass substrates by radio frequency(RF) reactive magnetron sputtering.The effect of buffer layers on the absorption characteristic and fluorescence spectrum of ZnO films was characterized by ultraviolet-visible spectrophotometer and fluorescence spectrophotometer.The results revealed that all films had an average optical transparency over 80% in the visible range,the UV absorption edge shifted to a longer wavelength after Ti buffer introduced and shifted to a shorter wavelength as the thickness of Ti buffer increased.Three main emission peaks including a UV located at about 390nm,two blue peaks located at about 435 and 487 nm and two green peaks located at about 525 and 560nm were observed from the PL spectra.The origin of these emissions was discussed.