CAJ | 학술논문

室温下,将能量为250 keV He+离子注入z切钽酸锂单晶,注量范围为5.0×1014～5.0×1016 He+/cm2,应用三维轮廓仪、X射线衍射( XRD )、紫外可见( UV-Vis )光学吸收谱对未注入和注入样品进行了表征和分析.分析结果表明,在注量达到5.0×1016 He+/cm2时,样品表面出现大量凸起条纹,同时晶格沿着[001]方向出现明显肿胀,吸收边则表现出明显的注量相关性.注入样品在空气中放置60 d后,最高注量的样品表面原来凸起的条纹变为细长的裂纹,晶格应变及光学吸收边均出现较大的恢复.讨论了样品表面形貌、晶格应变和光学吸收边与He行为的关系.
실온하,장능량위250 keV He+리자주입z절단산리단정,주량범위위5.0×1014～5.0×1016 He+/cm2,응용삼유륜곽의、X사선연사( XRD )、자외가견( UV-Vis )광학흡수보대미주입화주입양품진행료표정화분석.분석결과표명,재주량체도5.0×1016 He+/cm2시,양품표면출현대량철기조문,동시정격연착[001]방향출현명현종창,흡수변칙표현출명현적주량상관성.주입양품재공기중방치60 d후,최고주량적양품표면원래철기적조문변위세장적렬문,정격응변급광학흡수변균출현교대적회복.토론료양품표면형모、정격응변화광학흡수변여He행위적관계.
The effects of 250 keV He+implantation in the fluence from 5.0×1014 to 5.0×1016 He+/cm2 on lithium tantalate at room temperature were investigated by 3D surface profiler, XRD and UV-Vis optical absorption spectroscopies. The experimental results show that a large number of raised stripes appear on the surface of the sample and the significant lattice swelling occurs along the direction [ 001 ] at the fluence of 5.0×1016 He+/cm2. The dependence of changes absorption edge on the fluences was revealed. After the samples had been exposed to the air for 60 days, the raised stripes on the surface have evolved into narrow cracks. Furthermore, the lattice strain and the optical absorption edge has also recovered dramatically. The relationship between surface morphology, lattice strain, optical absorption edge and behavior of He-ions was discussed.