CAJ | 학술논문

利用飞秒激光直写微纳加工平台,对6H-SiC材料进行了突破衍射极限的微纳结构加工研究.使用中心波长和脉宽分别为800 nm和130 fs的钛蓝宝石激光器和荧光倒置显微镜搭建了飞秒激光直写微纳加工平台,研究了在不同的实验条件下对6H-SiC的光学加工情况,采用扫描电子显微镜对加工结构进行表征.通过分析不同的激光功率和不同的曝光时间等实验条件下加工的分辨率,发现分辨率随着激光功率的减小而提高,随扫描速度的增大而提高,且能突破光学衍射极限.最终获得125 nm的加工线宽,并加工了加工线宽240 nm,周期1.0μm的线阵列.研究结果为微机电系统(MEMS)的微器件设计开创了新的思路,对发展MEMS器件具有重要意义.
이용비초격광직사미납가공평태,대6H-SiC재료진행료돌파연사겁한적미납결구가공연구.사용중심파장화맥관분별위800 nm화130 fs적태람보석격광기화형광도치현미경탑건료비초격광직사미납가공평태,연구료재불동적실험조건하대6H-SiC적광학가공정황,채용소묘전자현미경대가공결구진행표정.통과분석불동적격광공솔화불동적폭광시간등실험조건하가공적분변솔,발현분변솔수착격광공솔적감소이제고,수소묘속도적증대이제고,차능돌파광학연사겁한.최종획득125 nm적가공선관,병가공료가공선관240 nm,주기1.0μm적선진렬.연구결과위미궤전계통(MEMS)적미기건설계개창료신적사로,대발전MEMS기건구유중요의의.
@@@@Sub-diffraction-limit fabrication of 6H-SiC is investigated with femtosecond laser direct-write setup. Micro/nano-fabrication on 6H-SiC is studied with a home-made micro/nano-fabrication platform, which is integrated with a fluorescence microscope and a Ti:sapphire laser with a central wavelength of 800 nm and pulse duration of 130 fs. Micro/nano-structures are characterized with scanning electron microscope. It is found that the spatial resolution is improved with the decrease of laser power and the increase of scanning velocity. The smallest resolution achieved is 125 nm and line array with a line width of 240 nm and a period of 1 μm is fabricated. This work paves the new way for integrated micro electro-mechanical systems devices.