CAJ | 학술논문

采用多靶磁控溅射技术,制备TiCN、VCN单层膜及一系列调制比为1的不同调制周期的TiCN/VCN多层膜.利用X射线衍射仪、纳米压痕仪、高温摩擦磨损测试仪和扫描电子显微镜,研究各种薄膜的微结构、力学性能及室温和高温摩擦磨损性能.研究表明:不同调制周期的TiCN/VCN多层膜的硬度围绕混合法则计算的硬度值上下波动,没有出现致硬现象.TiCN和VCN单层薄膜室温下的摩擦因数很低,TiCN/VCN多层膜调制周期较小时摩擦因数较高,调制周期大于10 nm时摩擦因数逐渐接近TiCN和VCN单层膜.700℃下,TiCN/VCN多层膜的摩擦因数主要取决于表面生成的TiO2和V2O5的共同作用,与TiCN相比,TiCN/VCN多层膜的高温摩擦因数较小.
채용다파자공천사기술,제비TiCN、VCN단층막급일계렬조제비위1적불동조제주기적TiCN/VCN다층막.이용X사선연사의、납미압흔의、고온마찰마손측시의화소묘전자현미경,연구각충박막적미결구、역학성능급실온화고온마찰마손성능.연구표명:불동조제주기적TiCN/VCN다층막적경도위요혼합법칙계산적경도치상하파동,몰유출현치경현상.TiCN화VCN단층박막실온하적마찰인수흔저,TiCN/VCN다층막조제주기교소시마찰인수교고,조제주기대우10 nm시마찰인수축점접근TiCN화VCN단층막.700℃하,TiCN/VCN다층막적마찰인수주요취결우표면생성적TiO2화V2O5적공동작용,여TiCN상비,TiCN/VCN다층막적고온마찰인수교소.
TiCN, VCN monolithic films and TiCN/VCN mutilayers with different modulation periods were prepared by multi-target magnetic sputtering. The microstructure, mechanical properties, friction and wear properties at room and high-temperature of films were characterized by X-ray diffraction, nano-indentation, and CSM high-temperature ball-on-disc tribometer. The results show that the hardness of TiCN/VCN multilayers is close to the value calculated around the rule of mixtures, and super high hardness does not appear. The friction coefficients of TiCN and VCN films are very low in room-temperature. The friction coefficients of TiCN/VCN mutilayers are higher when their modulation periods are small, but when their modulation periods are more than 10nm, the friction coefficients of TiCN/VCN mutilayers will be close to that of the TiCN and VCN films. When the temperature reach to 700 ℃, The friction coefficients of TiCN/VCN mutilayers are depending on TiO2 and V2O5. Compared with TiCN films, the friction coefficient of TiCN/VCN mutilayers decrease at high temperature.