CAJ | 학술논문

线振动 MEMS 陀螺在大载荷条件下,驱动轴与检测轴的谐振频率会发生漂移,频差随载荷变大.这类型振动陀螺为了提高灵敏度往往将两个振动轴的谐振频率设计得尽量靠近,但当角速率载荷较大时,两个振动轴的谐振频率将发生分裂漂移,彼此互相远离.漂移量与向心加速度无关,近似与角速率载荷的平方成正比,且两轴的谐振频率越靠近漂移越剧烈.考虑到 Coriolis 效应的弹簧质量块二维振动数学模型可定量描述该现象,表明此现象为线振动陀螺 Coriolis 效应的一部分.理论分析、仿真研究和实验数据的不同角度对这种频率漂移特性的分析结果吻合良好,为进一步结构优化奠定了理论基础.
선진동 MEMS 타라재대재하조건하,구동축여검측축적해진빈솔회발생표이,빈차수재하변대.저류형진동타라위료제고령민도왕왕장량개진동축적해진빈솔설계득진량고근,단당각속솔재하교대시,량개진동축적해진빈솔장발생분렬표이,피차호상원리.표이량여향심가속도무관,근사여각속솔재하적평방성정비,차량축적해진빈솔월고근표이월극렬.고필도 Coriolis 효응적탄황질량괴이유진동수학모형가정량묘술해현상,표명차현상위선진동타라 Coriolis 효응적일부분.이론분석、방진연구화실험수거적불동각도대저충빈솔표이특성적분석결과문합량호,위진일보결구우화전정료이론기출.
The resonant frequencies of a straight line vibration gyro would generate drifts between drive axis and sense axis under heavy angular velocity load. The two frequencies are always designed to be close to get a high sensitivity. But when the angular velocity load is heavy, the resonant frequencies in two axes will drift apart from each other. The amount of the drift has no relationship with the centripetal acceleration, but be proportional to the square of the angular velocity load, and be more drastically when the two resonant frequencies are closer. In this paper, two-dimension vibration differential equations were derived to represent this phenomenon by considering the Coriolis influence, and it is indicated that the drift is caused by the Coriolis influence. The analysis results by the theory solution, simulation method, and the experiment data meet well with each other, and provide a theory basis for the optimization of the dimension parameters.