CAJ | 학술논문

硅微谐振加速度计以其小体积、低成本和高精度的频率信号输出,成为硅微惯性传感器研制的热点之一.温度特性是影响硅微谐振加速度计精度水平的重要因素.在分析硅微谐振加速度计工作机理的基础上,从结构设计方法、工艺流程加工和闭环控制回路方面分析了温度对零位和标度因数的影响因素,同时给出了相应解决措施.研制的硅微谐振加速度计基频约为17 kHz,标度因数约220 Hz/g,在-40~+70℃范围内,谐振频率的温度系数为-71.5×10-6/℃,标度因数的温度系数为-610×10-6/℃,样机在常温下谐振频率的相对稳定性为0.313×10-6,1.5 h 零偏稳定性达到42.5μg.
규미해진가속도계이기소체적、저성본화고정도적빈솔신호수출,성위규미관성전감기연제적열점지일.온도특성시영향규미해진가속도계정도수평적중요인소.재분석규미해진가속도계공작궤리적기출상,종결구설계방법、공예류정가공화폐배공제회로방면분석료온도대령위화표도인수적영향인소,동시급출료상응해결조시.연제적규미해진가속도계기빈약위17 kHz,표도인수약220 Hz/g,재-40~+70℃범위내,해진빈솔적온도계수위-71.5×10-6/℃,표도인수적온도계수위-610×10-6/℃,양궤재상온하해진빈솔적상대은정성위0.313×10-6,1.5 h 령편은정성체도42.5μg.
The silicon resonant accelerometer(SRA) is one of research hotspots of inertial instrument for it is small volume, low cost and takes quasi-digital signal as output. The temperature characteristic is one of the important factors that influence the performance of the silicon resonant accelerometer. In this paper, the relationship between the temperature effect and the design of structure and closed-loop control circuits was studied, and the theory and the corresponding solutions were introduced. The natural frequency of the designed accelerometer is 17 kHz with a scale factor of 220 Hz/g. Within -40℃~+70℃, the temperature coefficient of natural frequency and scale factor are -71.5×10-6/℃ and -610×10-6/℃ respectively, and the stability of frequency and bias are 0.313×10-6 and 42.5 μg respectively.