电子工艺技术
電子工藝技術
전자공예기술
ELECTRONICS PROCESS TECHNOLOGY
2013年
2期
114-117
,共4页
李元生%杨中元%赵丹%金谋平%陈彦青
李元生%楊中元%趙丹%金謀平%陳彥青
리원생%양중원%조단%금모평%진언청
等离子喷涂%孔隙率%介电常数%介电损耗
等離子噴塗%孔隙率%介電常數%介電損耗
등리자분도%공극솔%개전상수%개전손모
Plasma spray%Porosity rate%Dielectric constant%Dielectric loss
将两种纯度较高的Al2O3粉末采用等离子喷涂工艺制备成块体,其孔隙率分别达到11.2%和11.6%.用等离子喷涂工艺制备的Al2O3块体在7 GHz~18 GHz下的介电常数εr分别是7.2和7.1,介电损耗tanδ分别是3.5×10-3和1.0×10-3.用这种工艺制备的Al2O3块体的介电常数比常规压制烧结工艺制备的低,但是介电损耗大,这主要与等离子喷涂工艺所制备样品的孔隙率和微结构等有关.
將兩種純度較高的Al2O3粉末採用等離子噴塗工藝製備成塊體,其孔隙率分彆達到11.2%和11.6%.用等離子噴塗工藝製備的Al2O3塊體在7 GHz~18 GHz下的介電常數εr分彆是7.2和7.1,介電損耗tanδ分彆是3.5×10-3和1.0×10-3.用這種工藝製備的Al2O3塊體的介電常數比常規壓製燒結工藝製備的低,但是介電損耗大,這主要與等離子噴塗工藝所製備樣品的孔隙率和微結構等有關.
장량충순도교고적Al2O3분말채용등리자분도공예제비성괴체,기공극솔분별체도11.2%화11.6%.용등리자분도공예제비적Al2O3괴체재7 GHz~18 GHz하적개전상수εr분별시7.2화7.1,개전손모tanδ분별시3.5×10-3화1.0×10-3.용저충공예제비적Al2O3괴체적개전상수비상규압제소결공예제비적저,단시개전손모대,저주요여등리자분도공예소제비양품적공극솔화미결구등유관.
Two kinds of alumina bulks were manufactured by plasma spray with high purity alumina powders. Porosity rates are up to 11.2%and 11.6%. Dielectric constants are 7.2 and 7.1, and dielectric loss are 3.5×10-3 and1.0×10-3 respectively at 7 GHz~18 GHz. The dielectric constant of plasma sprayed Al2O3 sample is lower than that of Al2O3 ceramics shaped by pressing and sintering. whereas the dielectric loss is much more.These results are related to porosity rate, microstructure of samples manufactured by plasma spraying.
