CAJ | 학술논문

针对大面积且高密度PCB光刻,利用ZEMAX光学设计软件,设计了一种8片式光刻投影物镜.该物镜采用对称双高斯结构,放大倍率为-1,数值孔径NA=0.06,单次曝光面积Φ=80 mm,具有优于7μm的分辨力和120μm的焦深.通过对该镜头进行公差分析,表明最紧公差为部分元件倾斜要小于0.017°.用Monte Carlo方法模拟了制造50组镜头的成像质量,得到在空间频率72 line/mm处,90%的镜头的MTF>0.58,因此加工装配时能保证90%以上的成品率.
침대대면적차고밀도PCB광각,이용ZEMAX광학설계연건,설계료일충8편식광각투영물경.해물경채용대칭쌍고사결구,방대배솔위-1,수치공경NA=0.06,단차폭광면적Φ=80 mm,구유우우7μm적분변력화120μm적초심.통과대해경두진행공차분석,표명최긴공차위부분원건경사요소우0.017°.용Monte Carlo방법모의료제조50조경두적성상질량,득도재공간빈솔72 line/mm처,90%적경두적MTF>0.58,인차가공장배시능보증90%이상적성품솔.
For large-area and high-density Printed Circuit Board (PCB) lithography,we use ZEMAX optical design software to design a kind of lithographic projection lens with 8 optics element. Symmetrical double Gaussian structure is applied in the lens, the magnification is-1, and numerical aperture NA=0.06. It can exposure a area ofΦ=80 mm at a time, and have better than 7μm resolution and 120μm focus shift.The result of tolerance analysis show that the tightest tolerance is part of the element tilts,which should be lower than 0.017 °. We use the Monte Carlo method to simulate fabricating and assembling 50 group of lens. The results show 90% of the lens MTF > 0.58 at spatial frequency 72 line/mm, which can ensure more than 90%yield when they are fabricated and assembled.