CAJ | 학술논문

目前国内外大口径KDP晶体加工都采用立式空气静压主轴超精密飞切机床加工,但立式空气静压主轴存在阻尼低、抑振困难的缺陷.利用液体的高阻尼特性,设计出采用大止推盘的立式液体静压主轴结构,研究止推油膜厚度和偏心量对立式主轴的最高温升及承载力的影响规律.结果表明:随着油膜厚度的减小,温升量和承载力逐渐增大,且增大的越来越快;主轴温升主要出现在轴承油膜区域,同时由于结构和散热条件的影响,止推轴承区域的温升明显高于径向轴承区域温升.
목전국내외대구경KDP정체가공도채용입식공기정압주축초정밀비절궤상가공,단입식공기정압주축존재조니저、억진곤난적결함.이용액체적고조니특성,설계출채용대지추반적입식액체정압주축결구,연구지추유막후도화편심량대입식주축적최고온승급승재력적영향규률.결과표명:수착유막후도적감소,온승량화승재력축점증대,차증대적월래월쾌;주축온승주요출현재축승유막구역,동시유우결구화산열조건적영향,지추축승구역적온승명현고우경향축승구역온승.
At present,the processing of the large diameter KDP crystal is using ultra precision flying cut machine tool with vertical aerostatic spindle at home and abroad. But the limitation of the vertical aerostatic spindle is low damping and difficulty to suppression of vibration. A vertical hydrostatic spindle structure adopted with a large thrust plate was designed based on the high damping characteristic of liquid. The influences of the thrust oil film thickness and eccentric value on the highest temperature rise and bearing capacity of the vertical spindle were analyzed. The results show that the temperature rising and bearing capacity are increased gradually with the decreasing of the oil film thickness,and increased more and more fast. The temperature rising of the spindle mainly is appeared in the bearing oil film area,and the temperature rising of the thrust bearing area is obviously higher than that of the radial bearing area due to the influence of the spindle struc-ture and cooling condition.