CAJ | 학술논문

随着电子产品集成度越来越高,器件对静电也越来越敏感,容易受静电放电导致损伤或损坏.文章介绍了静电的产生机理,阐述在生产制造过程中静电产生的来源以及危害.介绍了净化间内部抑制静电产生的三大措施:防止静电荷积聚,建立安全的静电泄放通路,以及采取静电监控设备进行静电监控.提出采用镀锡铜排环绕厂房内部的形式来消除静电防护死角,并重点描述了防静电门禁系统和静电在线监控系统的工作原理及功能实现,结合电子封装厂房结构特点,首次提出防静电门禁系统与风淋门联动控制,有效控制封装厂房的静电来源.
수착전자산품집성도월래월고,기건대정전야월래월민감,용역수정전방전도치손상혹손배.문장개소료정전적산생궤리,천술재생산제조과정중정전산생적래원이급위해.개소료정화간내부억제정전산생적삼대조시:방지정전하적취,건립안전적정전설방통로,이급채취정전감공설비진행정전감공.제출채용도석동배배요엄방내부적형식래소제정전방호사각,병중점묘술료방정전문금계통화정전재선감공계통적공작원리급공능실현,결합전자봉장엄방결구특점,수차제출방정전문금계통여풍림문련동공제,유효공제봉장엄방적정전래원.
@@@@With the development of electronic products increasing integration, device is more and more sensitive to static electricity, and is susceptible to electrostatic discharge damage. This paper describes the mechanism of static electricity, expatiates the origin and the harm of static electricity. Introduces several measure to control static electricity in clean plant: preventing the accumulation of electrostatic charge, building safe electrostatic discharge path, and using electrostatic monitor equipment to monitoring the static electricity. Put forward to fix copper basketwork plated with tin along the wall to avoid ESD protection dead area. Introduces work principle and the function of electrostatic monitor system. Combined with the plant structure specialty, put forward the linkage control of antistatic access control system and air shower door for the first time, to control the electrostatic source effectively.