物理学报
物理學報
물이학보
2013年
3期
192-198
,共7页
张瑜洁*%张万荣%金冬月%陈亮%付强%郭振杰%邢光辉%路志义
張瑜潔*%張萬榮%金鼕月%陳亮%付彊%郭振傑%邢光輝%路誌義
장유길*%장만영%금동월%진량%부강%곽진걸%형광휘%로지의
SiGe异质结双极型晶体管%温度特性%基区杂质分布%Ge组分分布
SiGe異質結雙極型晶體管%溫度特性%基區雜質分佈%Ge組分分佈
SiGe이질결쌍겁형정체관%온도특성%기구잡질분포%Ge조분분포
SiGe heterojunction bipolar transistor%thermal characteristic%base doping%Ge-profile
众所周知,双极型晶体管的设计主要是基区的设计.一般而言,基区的杂质分布是非均匀的.本文首先研究了非均匀的杂质高斯分布对器件温度分布、增益和截止频率的温度特性的影响,发现增益和截止频率具有正温度系数,体内温度较高.随后研究了基区Ge组分分布对这些器件参数的影响.均匀Ge组分分布和梯形Ge组分分布的SiGe异质结双极型晶体管增益和截止频率具有负温度系数,具有较好的体内温度分布.进一步的研究表明,具有梯形Ge组分分布的SiGe异质结双极型晶体管,由于Ge组分缓变引入了少子加速电场,不但使它的增益和截止频率具有较高的值,而且保持了较弱的温度敏感性,在增益、特征频率大小及其温度敏感性、体内温度分布达到了很好的折中.
衆所週知,雙極型晶體管的設計主要是基區的設計.一般而言,基區的雜質分佈是非均勻的.本文首先研究瞭非均勻的雜質高斯分佈對器件溫度分佈、增益和截止頻率的溫度特性的影響,髮現增益和截止頻率具有正溫度繫數,體內溫度較高.隨後研究瞭基區Ge組分分佈對這些器件參數的影響.均勻Ge組分分佈和梯形Ge組分分佈的SiGe異質結雙極型晶體管增益和截止頻率具有負溫度繫數,具有較好的體內溫度分佈.進一步的研究錶明,具有梯形Ge組分分佈的SiGe異質結雙極型晶體管,由于Ge組分緩變引入瞭少子加速電場,不但使它的增益和截止頻率具有較高的值,而且保持瞭較弱的溫度敏感性,在增益、特徵頻率大小及其溫度敏感性、體內溫度分佈達到瞭很好的摺中.
음소주지,쌍겁형정체관적설계주요시기구적설계.일반이언,기구적잡질분포시비균균적.본문수선연구료비균균적잡질고사분포대기건온도분포、증익화절지빈솔적온도특성적영향,발현증익화절지빈솔구유정온도계수,체내온도교고.수후연구료기구Ge조분분포대저사기건삼수적영향.균균Ge조분분포화제형Ge조분분포적SiGe이질결쌍겁형정체관증익화절지빈솔구유부온도계수,구유교호적체내온도분포.진일보적연구표명,구유제형Ge조분분포적SiGe이질결쌍겁형정체관,유우Ge조분완변인입료소자가속전장,불단사타적증익화절지빈솔구유교고적치,이차보지료교약적온도민감성,재증익、특정빈솔대소급기온도민감성、체내온도분포체도료흔호적절중.
As is well known, base region is the design focus of bipolar junction transistor (BJT). Generally, the doping distribution in base is non-uniform. In this paper, the effects of different Gaussian dopings in the base on bulk temperature distribution, temperature dependences of current gain and cut-off frequency are first studied. It is found that current gain and cut-off frequency of BJT have positive temperature coefficients, and the temperature in bulk is high. Then, the effect of Ge composition distribution on these device parameters is investigated. It is found that the SiGe heterojunction bipolar transistors (HBTs) with box Ge composition distribution and trapezoidal Ge composition distribution have negative temperature coefficients of current gain and cut-off frequency, and have good bulk temperature distributions. Furthermore, the SiGe HBT with trapezoidal Ge profile has higher current gain and cut-off frequency, and its temperature insensitivity is kept. The good trade-off is made among the magnitudes of current gain and cut-off frequency, temperature sensitivity and bulk temperature distribution.