物理学报
物理學報
물이학보
2013年
3期
270-276
,共7页
汪昌州%朱伟玲%翟继卫%赖天树
汪昌州%硃偉玲%翟繼衛%賴天樹
왕창주%주위령%적계위%뢰천수
纳米复合%多层薄膜%相变%光学特性
納米複閤%多層薄膜%相變%光學特性
납미복합%다층박막%상변%광학특성
nanocomposite%multilayer films%phase-change behavior%optical properties
采用磁控二靶(Ga30Sb70和Sb80Te20)交替溅射方法制备了新型Ga30Sb70/Sb80Te20纳米复合多层薄膜,对多层薄膜周期中Ga30Sb70层厚度对相变特性的影响进行了研究.结果表明,多层薄膜的结晶温度可以通过周期中Ga30Sb70层厚度进行调节,且随着Ga30Sb70层厚度的增加而升高. Ga30Sb70/Sb80Te20纳米复合多层薄膜的光学带隙随Ga30Sb70层厚度的增加而增大.采用皮秒激光脉冲抽运光探测技术研究了多层薄膜的瞬态结晶动力学过程,利用不同能量密度的皮秒激光脉冲可以实现Ga30Sb70/Sb80Te20多层薄膜非晶态和晶态的可逆转变.
採用磁控二靶(Ga30Sb70和Sb80Te20)交替濺射方法製備瞭新型Ga30Sb70/Sb80Te20納米複閤多層薄膜,對多層薄膜週期中Ga30Sb70層厚度對相變特性的影響進行瞭研究.結果錶明,多層薄膜的結晶溫度可以通過週期中Ga30Sb70層厚度進行調節,且隨著Ga30Sb70層厚度的增加而升高. Ga30Sb70/Sb80Te20納米複閤多層薄膜的光學帶隙隨Ga30Sb70層厚度的增加而增大.採用皮秒激光脈遲抽運光探測技術研究瞭多層薄膜的瞬態結晶動力學過程,利用不同能量密度的皮秒激光脈遲可以實現Ga30Sb70/Sb80Te20多層薄膜非晶態和晶態的可逆轉變.
채용자공이파(Ga30Sb70화Sb80Te20)교체천사방법제비료신형Ga30Sb70/Sb80Te20납미복합다층박막,대다층박막주기중Ga30Sb70층후도대상변특성적영향진행료연구.결과표명,다층박막적결정온도가이통과주기중Ga30Sb70층후도진행조절,차수착Ga30Sb70층후도적증가이승고. Ga30Sb70/Sb80Te20납미복합다층박막적광학대극수Ga30Sb70층후도적증가이증대.채용피초격광맥충추운광탐측기술연구료다층박막적순태결정동역학과정,이용불동능량밀도적피초격광맥충가이실현Ga30Sb70/Sb80Te20다층박막비정태화정태적가역전변.
Novel Ga30Sb70/Sb80Te20 nanocomposite multilayer films are prepared by alternate sputter deposition of two independent targets of Ga30Sb70 and Sb80Te20 in a magnetron sputtering system. The influence of layer thickness of Ga30Sb70 on the phase-change behavior of Ga30Sb70/Sb80Te20 multilayer film is investigated. The results show that the crystallization temperature can be controlled by adjusting the layer thickness of Ga30Sb70. The crystallization temperature increases with increasing the layer thickness of Ga30Sb70. The optical band gap is also found to increase with increasing in the layer thickness of Ga30Sb70. Transient crystallization dynamics of Ga30Sb70/Sb80Te20 multilayer film induced by single picosecond laser pulse pumping, is studied. The reversible phase transition between amorphous and crystalline state can be achieved by using picosecond laser pulses with different fluences.