CAJ | 학술논문

利用等离子体化学气相沉积技术,在引入Ti过渡层后的Co膜表面一步制备出碳纳米片-碳纳米管复合材料,研究了Co膜厚度对复合材料形貌及场发射性质的影响.当Co薄膜厚度为11 nm时,得到了垂直基片定向生长的碳纳米管和碳纳米片复合物,此时,碳纳米片分布在碳纳米管的管壁上和管的顶端,样品的场发射性能最佳.
이용등리자체화학기상침적기술,재인입Ti과도층후적Co막표면일보제비출탄납미편-탄납미관복합재료,연구료Co막후도대복합재료형모급장발사성질적영향.당Co박막후도위11 nm시,득도료수직기편정향생장적탄납미관화탄납미편복합물,차시,탄납미편분포재탄납미관적관벽상화관적정단,양품적장발사성능최가.
One-step synthesis of a carbon nano sheets-carbon nanotubes composite by plasma enhanced chemical vapor deposition and its field emission properties are investigated. We obtain the carbon nano sheets-carbon nanotube composite on the Co thin film with 20 nm Ti interlayer. We gain carbon nano sheets only on the Co thin films without Ti interlayer in the same growth conditions. The carbon nano sheets are distributed on the side wall and the top of carbon nanotubes. The Ti interlayer hinders the diffusion of Co into the silicon substrate and improves the catalytic capability of Co, thus it will help the growth of carbon nanotubes. When the thickness of Co film is 11 nm, the carbon nanotubes are vertically aligned on the flat Co film surface. Most of the carbon nano sheets are distributed on the top of the carbon nanotubes under this condition, which increases the number of emitters and enhances the field emission properties of the composites.