物理学报
物理學報
물이학보
2013年
5期
522-526
,共5页
李兴冀%刘超铭%孙中亮%兰慕杰%肖立伊%何世禹
李興冀%劉超銘%孫中亮%蘭慕傑%肖立伊%何世禹
리흥기%류초명%손중량%란모걸%초립이%하세우
CMOS器件%高能带电粒子%电离辐射%辐射损伤
CMOS器件%高能帶電粒子%電離輻射%輻射損傷
CMOS기건%고능대전입자%전리복사%복사손상
CMOS device%high-energy charged particle%ionizing radiation%radiation damage
本文采用60 MeV Br离子、5 MeV质子和1 MeV电子等三种辐射源,针对CC4013型互补金属氧化物半导体器件(complementary metal oxide semiconductor, CMOS)进行辐射损伤研究.通过Geant4程序计算了该器件电离辐射吸收剂量与芯片厚度的关系,经过计算,在相同注量下,60 MeV Br离子的电离吸收剂量最大,1 MeV电子产生的电离吸收剂量最小.应用Keithley4200-SCS半导体特性分析仪在原位条件下研究了CC4013器件电性能参数随辐射吸收剂量的变化关系.测试结果表明,相同电离辐射吸收剂量下,1 MeV电子对CC4013器件的阈值电压参数影响最大,5 MeV质子其次,60 MeV Br离子的影响最弱.
本文採用60 MeV Br離子、5 MeV質子和1 MeV電子等三種輻射源,針對CC4013型互補金屬氧化物半導體器件(complementary metal oxide semiconductor, CMOS)進行輻射損傷研究.通過Geant4程序計算瞭該器件電離輻射吸收劑量與芯片厚度的關繫,經過計算,在相同註量下,60 MeV Br離子的電離吸收劑量最大,1 MeV電子產生的電離吸收劑量最小.應用Keithley4200-SCS半導體特性分析儀在原位條件下研究瞭CC4013器件電性能參數隨輻射吸收劑量的變化關繫.測試結果錶明,相同電離輻射吸收劑量下,1 MeV電子對CC4013器件的閾值電壓參數影響最大,5 MeV質子其次,60 MeV Br離子的影響最弱.
본문채용60 MeV Br리자、5 MeV질자화1 MeV전자등삼충복사원,침대CC4013형호보금속양화물반도체기건(complementary metal oxide semiconductor, CMOS)진행복사손상연구.통과Geant4정서계산료해기건전리복사흡수제량여심편후도적관계,경과계산,재상동주량하,60 MeV Br리자적전리흡수제량최대,1 MeV전자산생적전리흡수제량최소.응용Keithley4200-SCS반도체특성분석의재원위조건하연구료CC4013기건전성능삼수수복사흡수제량적변화관계.측시결과표명,상동전리복사흡수제량하,1 MeV전자대CC4013기건적역치전압삼수영향최대,5 MeV질자기차,60 MeV Br리자적영향최약.
During serving in orbit, spacecraft will be affected by the radiation environment of the space high-energy charged particles, leading to the performance degradation or even malfunctions of electronic components. The complementary metal oxide semiconductor (CMOS) devices are sensitive to ionization damage. Therefore, it is valuable to research the mechanism of radiation effects on CMOS devices, and is significant to engineering and theory. The CC4013 CMOS integrated circuits are irradiated with 60 MeV Br ions, 5 MeV protons and 1 MeV electrons. Based on the data calculated by Geant4 code, the ionizing absorbed dose induced by 60 MeV Br ions is greatest, and the ionizing absorbed dose induced by 1 MeV electrons is lowest. The degradation of CC4013 device during the irradiation test is in-situ measured with Keithley 4200-SCS semiconductor characteristic system. From the experimental results, the threshold voltage degradation in CC4013 under an exposure of 1 MeV electrons is greatest at the same dose, a little lower under 5 MeV protons, and lowest under 60 MeV Br ions.