CAJ | 학술논문

采用两维PIC/MCC模型模拟了氮气微空心阴极放电以及轰击离子(N+2,N+)的钛阴极溅射.主要计算了氮气微空心阴极放电离子(N+2,N+)及溅射原子Ti的行为分布,并研究了溅射Ti原子的热化过程.结果表明:在模拟条件下,空心阴极效应是负辉区叠加的电子震荡;在对应条件下,微空心较传统空心放电两种离子(N+2,N+)密度均大两个量级,两种离子的平均能量的分布及大小几乎相同;在放电空间N+的密度约为N+2的1/6,最大能量约大2倍;在不同参数(P, T, V)下,轰击阴极内表面的氮离子(N+2,N+)的密度近似均匀,其平均能量几乎相等;从阴极溅射出的Ti原子的初始平均能量约6.8 eV,离开阴极约0.15 mm处几乎完全被热化.模拟结果为N2微空心阴极放电等离子体特性的认识提供了参考依据.
채용량유PIC/MCC모형모의료담기미공심음겁방전이급굉격리자(N+2,N+)적태음겁천사.주요계산료담기미공심음겁방전리자(N+2,N+)급천사원자Ti적행위분포,병연구료천사Ti원자적열화과정.결과표명:재모의조건하,공심음겁효응시부휘구첩가적전자진탕;재대응조건하,미공심교전통공심방전량충리자(N+2,N+)밀도균대량개량급,량충리자적평균능량적분포급대소궤호상동;재방전공간N+적밀도약위N+2적1/6,최대능량약대2배;재불동삼수(P, T, V)하,굉격음겁내표면적담리자(N+2,N+)적밀도근사균균,기평균능량궤호상등;종음겁천사출적Ti원자적초시평균능량약6.8 eV,리개음겁약0.15 mm처궤호완전피열화.모의결과위N2미공심음겁방전등리자체특성적인식제공료삼고의거.
The nitrogen microhollow cathode discharge and Ti cathode sputtering, bombarded by ions (N+2 , N+), have been studied using a two-dimensional PIC/MCC model. The behavior of ions (N+2 , N+) and sputtered atom (Ti), and the thermalization process of the sputtered atoms in a nitrogen microhollow cathode discharge are simulated. The results show that hollow cathode effect is due to electron oscillations in the overlapping negative glow under our simulation condition. The densities of ions (N+2 , N+) in the microhollow cathode discharge are two orders in magnitude greater than that in the conventional hollow cathode discharge;but the distributions and sizes of the mean energy of the ions (N+2 , N+) are almost the same. The density of N+2 is fivefold as much as that of N+ in the microdischarge space; however, the maximum of mean energy of the latter is twice larger than the former. For various parameters (P,T,V), the densities of ions(N+2 , N+) bombarding the cathode internal surface are almost uniformly distributed, and their mean energy are almost the same. When these atoms are 0.15 mm away from the cathode. The sputtered atoms are almost thermalized completely.