CAJ | 학술논문

谐振式压力传感器利用正反馈原理,构成包括机械谐振子在内的机电一体的高品质闭环谐振系统,闭环拓扑结构对保持机械谐振器振荡的稳定性和可靠性起着重要作用.本文针对一种典型结构的静电驱动电容检测谐振式压力传感器,在分析工作原理的基础上,构建了其行为级闭环自激仿真模型,在MATLAB 中对自激回路的起振情况进行了仿真;最后设计了基于 AGC 的闭环控制电路.
해진식압력전감기이용정반궤원리,구성포괄궤계해진자재내적궤전일체적고품질폐배해진계통,폐배탁복결구대보지궤계해진기진탕적은정성화가고성기착중요작용.본문침대일충전형결구적정전구동전용검측해진식압력전감기,재분석공작원리적기출상,구건료기행위급폐배자격방진모형,재MATLAB 중대자격회로적기진정황진행료방진;최후설계료기우 AGC 적폐배공제전로.
@@@@he theory of positive feedback is used by resonant pressure sensor to form high-quality mechanical and electrical integration close-loop resonant system including mechanical harmonic oscil ator, closed loop topology structure plays an important role to keep the stability and reliability of the mechanical resonator oscil ation. In this paper, a kind of typical structure of the electrostatic drive and capacitance detection resonant pressure sensor is analyzed. The behavior model of the closed-loop simulation of self-excitation is constructed based on analyzing the working principle, excitation circuit of the oscil ation starting are simulated using MATLAB. Final y, the closed-loop control circuit based on AGC is designed.