CAJ | 학술논문

研究了一种新型透红外的导电薄膜铜铝氧化物(CuAlxOy),选用高纯度铜、铝靶材,利用磁控溅射台在蓝宝石衬底上生长CuAlxOy薄膜.研究了氧气流量、薄膜厚度、预溅射铜层时间(铜层厚度)等重要条件对薄膜性能的影响.实验发现,通过微调溅射参数、合理控制预溅射铜层过程可以获得低电阻率和高透过率的铜铝氧化物薄膜.得到最好的CuAlxOy薄膜(厚度为1765?)在波长2.6μm处红外透过率达到了最大值62.5%,红外波段(波数8000~2000 cm-1)的平均透过率达到53%,方块电阻为358.9?/sq,电阻率为6.33×10-3?·cm.
연구료일충신형투홍외적도전박막동려양화물(CuAlxOy),선용고순도동、려파재,이용자공천사태재람보석츤저상생장CuAlxOy박막.연구료양기류량、박막후도、예천사동층시간(동층후도)등중요조건대박막성능적영향.실험발현,통과미조천사삼수、합리공제예천사동층과정가이획득저전조솔화고투과솔적동려양화물박막.득도최호적CuAlxOy박막(후도위1765?)재파장2.6μm처홍외투과솔체도료최대치62.5%,홍외파단(파수8000~2000 cm-1)적평균투과솔체도53%,방괴전조위358.9?/sq,전조솔위6.33×10-3?·cm.
@@@@This paper presents a novel infrared transparent conductive film based on copper aluminum oxides (CuAlxOy). CuAlxOy films are deposited on the sapphire by reactive magnetron co-sputtering using DC applied to the high-purity Cu target, RF applied to the high-purity Al target. Some influences of films properties are discussed. These influences have included the flow of oxygen gas, the thickness of films, the time of pre-deposition Cu layer etc. It has been found that, by fine-tuning the sputtering parameters and proper control of pre-deposition Cu layer, the films with both reasonably low resistivity and high transmittance can be obtained simultaneously. The best films with a thickness of 1765 ? has the highest transmission of 62.5%at the wavelength of 2.6μm, and the average transmission of 53%in the IR band(wave number from 8000 to 2000cm-1). The sheet resistance of the film is as low as 358.9?/sq, which corresponds to a resistivity of 6.33×10-3?·cm.