新乡学院学报(自然科学版)
新鄉學院學報(自然科學版)
신향학원학보(자연과학판)
Journal of Xinxiang University(Natural Science Edition)
2013年
2期
112-113
,共2页
磁控溅射%Zn1-xCaxO薄膜%光致发光
磁控濺射%Zn1-xCaxO薄膜%光緻髮光
자공천사%Zn1-xCaxO박막%광치발광
magnetron sputtering%Zn1-xCaxO thin films%photoluminescence
采用磁控溅射法在玻璃基片上制备了Zn1-xCaxO薄膜.利用X射线衍射仪(XRD)和荧光光谱仪研究了Ca掺杂量对Zn1-xCaxO薄膜结构和光致发光特性的影响.结果显示:Zn1-xCaxO薄膜属于纤锌矿多晶结构;随着 Ca含掺杂量的增加,薄膜衍射峰半高宽变大,薄膜质量变差;光致发光谱显示,随着 Ca掺杂量的增加,紫外发光谱峰发生了蓝移.
採用磁控濺射法在玻璃基片上製備瞭Zn1-xCaxO薄膜.利用X射線衍射儀(XRD)和熒光光譜儀研究瞭Ca摻雜量對Zn1-xCaxO薄膜結構和光緻髮光特性的影響.結果顯示:Zn1-xCaxO薄膜屬于纖鋅礦多晶結構;隨著 Ca含摻雜量的增加,薄膜衍射峰半高寬變大,薄膜質量變差;光緻髮光譜顯示,隨著 Ca摻雜量的增加,紫外髮光譜峰髮生瞭藍移.
채용자공천사법재파리기편상제비료Zn1-xCaxO박막.이용X사선연사의(XRD)화형광광보의연구료Ca참잡량대Zn1-xCaxO박막결구화광치발광특성적영향.결과현시:Zn1-xCaxO박막속우섬자광다정결구;수착 Ca함참잡량적증가,박막연사봉반고관변대,박막질량변차;광치발광보현시,수착 Ca참잡량적증가,자외발광보봉발생료람이.
Zn1-xCaxO thin film is fabricated on glass substrates by magnetron sputtering. The influences on the properties of structural of Zn1-xCaxO films and photoluminescence of Ca doping contents are studied by using the XRD、fluorescence spectroscope. The results are as followings: Zn1-xCaxO thin films belong to polycrystalline structure of wurtzite; with the increasing of Ca content, FWHM of diffraction peak widens and film quality deteriorates. Photoluminescence spectra show that with Ca doping concentration increasing, ultraviolet photoluminescence peak is blueshiftted.
