CAJ | 학술논문

采用电子束曝光技术以及反应离子刻蚀技术，提出一种简单可控、低成本制备有序排布的一维和二维光子晶体阵列的方法.通过有效的控制刻蚀工艺参数，实现对光子晶体在尺寸、周期和表面结构等进行精确控制目的.此外，以一维光子晶体为衬底，利用甩膜方法成功地制得分布反馈式高分子有机激光器.光泵结果表明，该激光染料的放大自发辐射的阈值为260 kW/cm2、半波宽为0．22 nm.
채용전자속폭광기술이급반응리자각식기술，제출일충간단가공、저성본제비유서배포적일유화이유광자정체진렬적방법.통과유효적공제각식공예삼수，실현대광자정체재척촌、주기화표면결구등진행정학공제목적.차외，이일유광자정체위츤저，이용솔막방법성공지제득분포반궤식고분자유궤격광기.광빙결과표명，해격광염료적방대자발복사적역치위260 kW/cm2、반파관위0．22 nm.
A simple and low-cost fabrication method of controllable one-dimensional and two-dimensional pho-tonic crystal arrays was reported in this paper by the means of e-beam lithography with reactive Ion etching.We employed efficient etching process which could improve accuracy control in the sizes,period,and surface mor-phology of photonic crystal arrays.Based on these advantages,the high-performance distributed feedback poly-mer lasing cavity has been fabricated.The optical pumping results show that we have successfully achieved a lasing from organic laser dye with a low amplified spontaneous emission threshold of 260 kW/cm2 and a narrow full width half maximum of 0.22 nm.