CAJ | 학술논문

为了减小现场环境与校准环境的差异对真空漏孔校准的影响，通过理论研究，设计了现场真空漏孔校准装置，可实现对真空漏孔的现场校准。考虑到现场真空漏孔校准装置需便于携带及搬运，装置的设计采用了分体式结构。现场真空漏孔校准装置由抽气系统、校准室系统、真空漏孔连接系统、流量输出系统、充气系统、定容室与压力测量系统及烘烤系统等7个部分组成，复合了定容法及固定流导法两种校准方法，预计真空漏孔校准范围为5×10-10～5×10-5 Pa?m3/s，合成标准不确定度为10％。
위료감소현장배경여교준배경적차이대진공루공교준적영향，통과이론연구，설계료현장진공루공교준장치，가실현대진공루공적현장교준。고필도현장진공루공교준장치수편우휴대급반운，장치적설계채용료분체식결구。현장진공루공교준장치유추기계통、교준실계통、진공루공련접계통、류량수출계통、충기계통、정용실여압력측량계통급홍고계통등7개부분조성，복합료정용법급고정류도법량충교준방법，예계진공루공교준범위위5×10-10～5×10-5 Pa?m3/s，합성표준불학정도위10％。
In order to reduce the influence of the discrepancy between in site and calibration environment on the cali-brated results,a vacuum leak calibration apparatus,which can be used to calibrate vacuum leak in site,was designed with the help of theoretical calculation.The modularization and split architecture was utilized in designing the apparatus in order to take-down and transportation easily. The calibration apparatus consists of pumping system,flow calibration system,vac-uum leak joint system,output system,charge gas system,constant-volume and pressure measurement system,and bake system together,and this apparatus can adopt two methods such as constant-volume method and constant conductance method to calibrate vacuum leak. The expected calibration range of the apparatus in operational site is 5×10-10~5×10-5 Pa?m3/s with a combined standard uncertainty less than 10%.